Optical constants

Refractive index of Microchem 8.5 mEL copolymer resist

Spec sheet: n 0.2–1.1 µm

Data
formula 5
Range
0.2–1.1 µm
Licence
CC0-1.0

Plot

Click the plot to set the calculator wavelength.

At one wavelength

Range 0.2–1.1 µm
Refractive index n
1.483
Extinction coefficient k
0
Permittivity ε1
2.1993
Permittivity ε2
0
Absorption coefficient α
0 cm⁻¹
Penetration depth δ = λ/(2πk)
— nm
Abbe number Vd
84.321
Chromatic dispersion dn/dλ
-0.0269617 µm⁻¹
Group index ng
1.49885
Group velocity dispersion
73.7409 fs²/mm
Dispersion parameter D
-402.296 ps/(nm·km)
Photon energy
2.11001 eV

ε = (n + ik)², α = 4πk/λ, ng = n − λ dn/dλ, GVD = λ³/(2πc²) d²n/dλ², D = −(λ/c) d²n/dλ². Group-velocity dispersion is given for formula data only.

Use it in Lightsmith

Load this data in Python, simulate in one more line

pip install lightsmith
import lightsmith as ls

# Microchem 8.5 mEL copolymer resist: Spec sheet: n 0.2–1.1 µm
microchem85mel = ls.fetch_refractiveindex("other", "Microchem85mEL", "specs", ref="c5c2f188e848453def5970e347399d653df2ffc2")
print(microchem85mel.range_nm)  # (200, 1100) nm
eps = microchem85mel.eps([633])  # complex permittivity

Downloads the original record once (pinned to the imported snapshot) and caches it.

Lightsmith is open source (MIT): Mie, T-matrix, BEM, DDA, FDTD, RCWA, TMM, mode solvers and inverse design behind one spec, on CPU or GPU. GitHub.

Dispersion formula

Cauchy (formula 5), λ in µm
n=1.478+0.0007204⁢λ−2.0+0.0003478⁢λ−4.0

Valid from 0.2 to 1.1 µm.

Coefficients as stored
CiValue
C11.478
C20.0007204
C3-2.0
C40.0003478
C5-4.0

Comments and conditions

Microchem 8.5 mEL copolymer resist

References

Cite

Microchem PMMA Datasheet, 2001; Data from the refractiveindex.info database (M. N. Polyanskiy, Sci. Data 11, 94 (2024), doi:10.1038/s41597-023-02898-2)

Data

Computed on 400 wavelengths, the same grid as the API and the library
Microchem 8.5 mEL copolymer resist, Spec sheet: n 0.2–1.1 µm: n and k versus wavelength
λ (µm)n
0.21.713385
0.2008561.709548
0.2017161.705775
0.202581.702065
0.2034471.698416
0.2043191.694828
0.2051931.6913
0.2060721.68783
0.2069541.684417
0.207841.681061
0.208731.677761
0.2096241.674516
0.2105221.671324
0.2114231.668185
0.2123281.665099
0.2132371.662063
0.214151.659078
0.2150671.656142
0.2159881.653255
0.2169131.650415
0.2178421.647623
0.2187741.644877
0.2197111.642176
0.2206521.63952
0.2215971.636908
0.2225451.634339
0.2234981.631812
0.2244551.629328
0.2254161.626884
0.2263811.624481
0.2273511.622117
0.2283241.619793
0.2293021.617507
0.2302841.615258
0.231271.613047
0.232261.610872
0.2332541.608734
0.2342531.60663
0.2352561.604561
0.2362631.602526
0.2372751.600525
0.2382911.598557
0.2393111.596621
0.2403361.594717
0.2413651.592845
0.2423981.591003
0.2434361.589191
0.2444781.58741
0.2455251.585658
0.2465771.583934
0.2476321.582239
0.2486931.580572
0.2497571.578932
0.2508271.577319
0.2519011.575733
0.2529791.574173
0.2540621.572638
0.255151.571128
0.2562431.569644
0.257341.568183
0.2584421.566747
0.2595481.565334
0.260661.563944
0.2617761.562578
0.2628971.561233
0.2640221.559911
0.2651531.55861
0.2662881.55733
0.2674281.556072
0.2685731.554834
0.2697231.553616
0.2708781.552418
0.2720381.55124
0.2732031.550081
0.2743721.548941
0.2755471.54782
0.2767271.546717
0.2779121.545632
0.2791021.544564
0.2802971.543515
0.2814971.542482
0.2827021.541466
0.2839131.540466
0.2851281.539483
0.2863491.538516
0.2875751.537565
0.2888061.536629
0.2900431.535708
0.2912851.534803
0.2925321.533912
0.2937851.533036
0.2950431.532173
0.2963061.531325
0.2975751.530491
0.2988491.52967
0.3001281.528863
0.3014131.528068
0.3027041.527287
0.3041.526518
0.3053021.525761
0.3066091.525017
0.3079221.524285
0.309241.523565
0.3105641.522857
0.3118941.522159
0.3132291.521474
0.314571.520799
0.3159171.520135
0.317271.519482
0.3186281.518839
0.3199931.518207
0.3213631.517585
0.3227391.516973
0.3241211.516371
0.3255081.515779
0.3269021.515196
0.3283021.514623
0.3297081.514059
0.3311191.513504
0.3325371.512957
0.3339611.51242
0.3353911.511891
0.3368271.511371
0.3382691.510859
0.3397171.510355
0.3411721.50986
0.3426331.509372
0.34411.508892
0.3455731.50842
0.3470531.507956
0.3485391.507498
0.3500311.507049
0.351531.506606
0.3530351.50617
0.3545461.505742
0.3560641.50532
0.3575891.504905
0.359121.504497
0.3606581.504095
0.3622021.503699
0.3637531.50331
0.365311.502927
0.3668741.50255
0.3684451.50218
0.3700231.501815
0.3716071.501455
0.3731981.501102
0.3747961.500754
0.3764011.500412
0.3780131.500075
0.3796311.499744
0.3812571.499417
0.3828891.499096
0.3845281.49878
0.3861751.498469
0.3878281.498163
0.3894891.497862
0.3911571.497565
0.3928311.497273
0.3945131.496986
0.3962031.496704
0.3978991.496425
0.3996031.496152
0.4013141.495882
0.4030321.495617
0.4047581.495356
0.4064911.495099
0.4082311.494846
0.4099791.494597
0.4117341.494352
0.4134971.49411
0.4152681.493873
0.4170461.493639
0.4188321.493409
0.4206251.493183
0.4224261.49296
0.4242351.49274
0.4260511.492524
0.4278751.492312
0.4297071.492102
0.4315471.491896
0.4333951.491693
0.4352511.491494
0.4371141.491297
0.4389861.491104
0.4408651.490913
0.4427531.490726
0.4446491.490541
0.4465531.490359
0.4484651.49018
0.4503851.490004
0.4523131.489831
0.454251.48966
0.4561951.489492
0.4581481.489326
0.460111.489163
0.462081.489003
0.4640581.488845
0.4660451.488689
0.4680411.488536
0.4700451.488385
0.4720571.488237
0.4740781.488091
0.4761081.487947
0.4781471.487805
0.4801941.487665
0.482251.487528
0.4843151.487393
0.4863891.487259
0.4884711.487128
0.4905631.486999
0.4926631.486872
0.4947731.486747
0.4968911.486623
0.4990191.486502
0.5011551.486382
0.5033011.486264
0.5054561.486148
0.507621.486034
0.5097941.485921
0.5119761.48581
0.5141691.485701
0.516371.485594
0.5185811.485488
0.5208011.485384
0.5230311.485281
0.5252711.48518
0.527521.48508
0.5297791.484982
0.5320471.484885
0.5343251.48479
0.5366131.484696
0.538911.484604
0.5412181.484513
0.5435351.484423
0.5458621.484335
0.54821.484248
0.5505471.484163
0.5529041.484078
0.5552721.483995
0.5576491.483913
0.5600371.483832
0.5624351.483753
0.5648431.483675
0.5672611.483598
0.569691.483522
0.5721291.483447
0.5745791.483373
0.5770391.4833
0.579511.483229
0.5819911.483158
0.5844831.483089
0.5869861.483021
0.5894991.482953
0.5920231.482887
0.5945581.482821
0.5971041.482757
0.599661.482693
0.6022281.48263
0.6048061.482569
0.6073961.482508
0.6099971.482448
0.6126081.482389
0.6152311.482331
0.6178661.482274
0.6205111.482217
0.6231681.482161
0.6258361.482106
0.6285161.482052
0.6312071.481999
0.633911.481947
0.6366241.481895
0.639351.481844
0.6420871.481794
0.6448361.481744
0.6475971.481695
0.650371.481647
0.6531551.4816
0.6559511.481553
0.658761.481507
0.6615811.481461
0.6644131.481417
0.6672581.481373
0.6701151.481329
0.6729841.481286
0.6758661.481244
0.678761.481202
0.6816661.481161
0.6845851.481121
0.6875161.481081
0.690461.481041
0.6934161.481003
0.6963851.480964
0.6993671.480927
0.7023611.48089
0.7053681.480853
0.7083881.480817
0.7114221.480781
0.7144681.480746
0.7175271.480711
0.7205991.480677
0.7236841.480644
0.7267831.48061
0.7298951.480578
0.733021.480545
0.7361591.480514
0.7393111.480482
0.7424761.480451
0.7456551.480421
0.7488481.480391
0.7520541.480361
0.7552741.480332
0.7585081.480303
0.7617561.480274
0.7650171.480246
0.7682931.480219
0.7715831.480191
0.7748861.480164
0.7782041.480138
0.7815361.480112
0.7848821.480086
0.7882431.48006
0.7916181.480035
0.7950071.48001
0.7984111.479986
0.801831.479962
0.8052631.479938
0.8087111.479915
0.8121741.479891
0.8156511.479869
0.8191441.479846
0.8226511.479824
0.8261731.479802
0.8297111.47978
0.8332631.479759
0.8368311.479738
0.8404141.479717
0.8440121.479697
0.8476261.479676
0.8512561.479657
0.85491.479637
0.8585611.479617
0.8622371.479598
0.8659291.479579
0.8696361.479561
0.873361.479542
0.8770991.479524
0.8808551.479506
0.8846261.479488
0.8884141.479471
0.8922181.479454
0.8960381.479437
0.8998751.47942
0.9037281.479403
0.9075971.479387
0.9114831.479371
0.9153861.479355
0.9193051.479339
0.9232411.479324
0.9271951.479309
0.9311641.479293
0.9351511.479279
0.9391551.479264
0.9431771.479249
0.9472151.479235
0.9512711.479221
0.9553441.479207
0.9594341.479193
0.9635421.479179
0.9676681.479166
0.9718111.479153
0.9759721.47914
0.9801511.479127
0.9843481.479114
0.9885621.479101
0.9927951.479089
0.9970461.479077
1.001311.479064
1.00561.479053
1.009911.479041
1.014231.479029
1.018571.479017
1.022941.479006
1.027321.478995
1.031711.478984
1.036131.478973
1.040571.478962
1.045021.478951
1.04951.478941
1.053991.47893
1.05851.47892
1.063041.47891
1.067591.4789
1.072161.47889
1.076751.47888
1.081361.47887
1.085991.478861
1.090641.478851
1.095311.478842
1.11.478833

Optical transmission calculator

Free-standing sample in vacuum, normal incidence
Method
Transmittance T
—
Reflectance R
—

Fresnel reflection calculator

Direction
Rp
—
Rs
—
R = (Rp+Rs)/2
—
Phase φp
—
Phase φs
—
Brewster angle θB
—
Critical angle θC
—