Optical constants

Refractive index of Si3N4, SiN (Silicon nitride)

Beliaev et al. 2022: Non-stoichiometric SiN; n,k 0.21-1.7 µm

Data
tabulated nk
Range
0.2114–1.688 µm
Points
697
Licence
CC0-1.0

Plot

Click the plot to set the calculator wavelength.

At one wavelength

Range 0.2114–1.688 µm
Refractive index n
2.02467
Extinction coefficient k
0
Permittivity ε1
4.0993
Permittivity ε2
0
Absorption coefficient α
0 cm⁻¹
Penetration depth δ = λ/(2πk)
— nm
Abbe number Vd
—
Chromatic dispersion dn/dλ
-0.14557 µm⁻¹
Group index ng
2.11021
Group velocity dispersion
— fs²/mm
Dispersion parameter D
— ps/(nm·km)
Photon energy
2.11001 eV

ε = (n + ik)², α = 4πk/λ, ng = n − λ dn/dλ, GVD = λ³/(2πc²) d²n/dλ², D = −(λ/c) d²n/dλ². Group-velocity dispersion is given for formula data only.

Use it in Lightsmith

Load this data in Python, simulate in one more line

pip install lightsmith
import lightsmith as ls

# Si3N4, SiN (Silicon nitride): Beliaev et al. 2022: Non-stoichiometric SiN; n,k 0.21-1.7 µm
si3n4_sin = ls.fetch_refractiveindex("main", "Si3N4", "Beliaev", ref="c5c2f188e848453def5970e347399d653df2ffc2")
print(si3n4_sin.range_nm)  # (211.4, 1688.16) nm
eps = si3n4_sin.eps([633])  # complex permittivity

Downloads the original record once (pinned to the imported snapshot) and caches it.

Lightsmith is open source (MIT): Mie, T-matrix, BEM, DDA, FDTD, RCWA, TMM, mode solvers and inverse design behind one spec, on CPU or GPU. GitHub.

Comments and conditions

100 nm thick film deposited by plasma-enchased CVD with certain recipe as an example. Optical properties of SiN films produced by different deposition methods and process parameters can be found in the reference.

Conditions

film thickness
100e-9
substrate
Si

References

L. Yu. Beliaev, E. Shkondin, A. V. Lavrinenko, O. Takayama. Optical, structural and composition properties of silicon nitride films deposited by reactive radio-frequency sputtering, low pressure and plasma-enhanced chemical vapor deposition. Thin Solid Films 763, 139568 (2022) (Numerical data kindly provided by Osamu Takayama)
  • doi:10.1016/j.tsf.2022.139568 Optical, structural and composition properties of silicon nitride films deposited by reactive radio-frequency sputtering, low pressure and plasma-enhanced chemical vapor deposition, Thin Solid Films (2022)

Cite

Leonid Yu. Beliaev, Evgeniy Shkondin, Andrei V. Lavrinenko and Osamu Takayama. Optical, structural and composition properties of silicon nitride films deposited by reactive radio-frequency sputtering, low pressure and plasma-enhanced chemical vapor deposition. Thin Solid Films, 763, 139568 (2022), doi:10.1016/j.tsf.2022.139568; Data from the refractiveindex.info database (M. N. Polyanskiy, Sci. Data 11, 94 (2024), doi:10.1038/s41597-023-02898-2)

Data

697 rows as published
Si3N4, SiN (Silicon nitride), Beliaev et al. 2022: Non-stoichiometric SiN; n,k 0.21-1.7 µm: n and k versus wavelength
λ (µm)nk
0.21142.527820.159962
0.212982.517680.150938
0.214562.50770.142345
0.216142.497880.134161
0.217722.488230.126366
0.21932.478740.118942
0.220892.469410.11187
0.222472.460250.105135
0.224052.451240.0987212
0.225632.442390.0926139
0.227212.43370.0867992
0.22882.425170.0812643
0.230382.416790.0759968
0.231962.408560.0709853
0.233542.400470.0662188
0.235132.392540.0616872
0.236712.384750.0573806
0.238292.377110.05329
0.239872.36960.0494066
0.241462.362230.0457222
0.243042.355010.042229
0.244622.347910.0389197
0.246212.340950.0357874
0.247792.334120.0328252
0.249372.327420.030027
0.250962.320850.0273867
0.252542.31440.0248991
0.254122.308080.0225581
0.255712.301880.0203592
0.257292.29580.0182973
0.258872.289840.0163677
0.260462.2840.0145661
0.262042.278280.012888
0.263632.272670.0113298
0.265212.267180.0098874
0.26682.26180.00855734
0.268382.256540.0073358
0.269962.251380.00621973
0.271552.246340.00520602
0.273132.241410.00429126
0.274722.23660.00347269
0.27632.231890.00274744
0.277892.22730.0021131
0.279472.222820.0015667
0.281062.218450.00110595
0.282642.21420.000728479
0.284232.210070.000431887
0.285812.206060.000214183
0.28742.202177.28827e-05
0.288982.198426.14076e-06
0.290572.194840.0
0.292152.191410.0
0.293742.188110.0
0.295332.184920.0
0.296912.181830.0
0.29852.178830.0
0.300082.175920.0
0.301672.173090.0
0.303252.170340.0
0.304842.167660.0
0.306432.165060.0
0.308012.162520.0
0.30962.160040.0
0.311192.157630.0
0.312772.155270.0
0.314362.152970.0
0.315952.150730.0
0.317532.148530.0
0.319122.146390.0
0.32072.144290.0
0.322292.142240.0
0.323882.140240.0
0.325472.138280.0
0.327052.136360.0
0.328642.134480.0
0.330232.132640.0
0.331812.130830.0
0.33342.129070.0
0.334992.127340.0
0.336582.125640.0
0.338162.123980.0
0.339752.122350.0
0.341342.120750.0
0.342922.119180.0
0.344512.117640.0
0.34612.116140.0
0.347692.114650.0
0.349282.11320.0
0.350862.111770.0
0.352452.110370.0
0.354042.1090.0
0.355632.107640.0
0.357212.106320.0
0.35882.105010.0
0.360392.103730.0
0.361982.102470.0
0.363572.101230.0
0.365152.100010.0
0.366742.098820.0
0.368332.097640.0
0.369922.096480.0
0.371512.095340.0
0.37312.094220.0
0.374682.093120.0
0.376272.092040.0
0.377862.090970.0
0.379452.089920.0
0.381042.088890.0
0.382632.087870.0
0.384222.086870.0
0.385812.085890.0
0.387392.084920.0
0.388982.083960.0
0.390572.083020.0
0.392162.082090.0
0.393752.081180.0
0.395342.080280.0
0.396932.079390.0
0.398522.078520.0
0.400112.077660.0
0.401692.076810.0
0.403282.075980.0
0.404872.075150.0
0.406462.074340.0
0.408052.073540.0
0.409642.072750.0
0.411232.071970.0
0.412822.071210.0
0.414412.070450.0
0.4162.06970.0
0.417592.068970.0
0.419182.068240.0
0.420772.067530.0
0.422352.066820.0
0.423942.066120.0
0.425532.065440.0
0.427122.064760.0
0.428712.064090.0
0.43032.063430.0
0.431892.062770.0
0.433482.062130.0
0.435072.06150.0
0.436662.060870.0
0.438252.060250.0
0.439842.059640.0
0.441432.059030.0
0.443022.058440.0
0.444612.057850.0
0.44622.057270.0
0.447792.056690.0
0.449382.056130.0
0.450972.055570.0
0.452562.055010.0
0.454152.054470.0
0.455742.053930.0
0.457332.05340.0
0.458922.052870.0
0.460512.052350.0
0.46212.051830.0
0.463692.051330.0
0.465282.050820.0
0.466872.050330.0
0.468462.049840.0
0.470052.049350.0
0.471642.048870.0
0.473232.04840.0
0.474822.047930.0
0.476412.047470.0
0.4782.047010.0
0.479592.046560.0
0.481182.046110.0
0.482772.045670.0
0.484362.045230.0
0.485952.04480.0
0.487542.044370.0
0.489132.043950.0
0.490722.043530.0
0.492312.043120.0
0.49392.042710.0
0.495492.04230.0
0.497082.04190.0
0.498672.041510.0
0.500262.041110.0
0.501852.040730.0
0.503442.040340.0
0.505032.039960.0
0.506622.039590.0
0.508212.039220.0
0.50982.038850.0
0.511392.038490.0
0.512982.038130.0
0.514572.037770.0
0.516162.037420.0
0.517752.037070.0
0.519342.036720.0
0.520932.036380.0
0.522522.036040.0
0.524112.035710.0
0.525692.035380.0
0.527282.035050.0
0.528872.034720.0
0.530462.03440.0
0.532052.034080.0
0.533642.033770.0
0.535232.033460.0
0.536822.033150.0
0.538412.032840.0
0.542.032540.0
0.541592.032240.0
0.543182.031940.0
0.544772.031650.0
0.546362.031350.0
0.547952.031060.0
0.549542.030780.0
0.551132.03050.0
0.552722.030220.0
0.554312.029940.0
0.55592.029660.0
0.557492.029390.0
0.559082.029120.0
0.560672.028850.0
0.562262.028590.0
0.563852.028320.0
0.565442.028060.0
0.567032.027810.0
0.568612.027550.0
0.57022.02730.0
0.571792.027050.0
0.573382.02680.0
0.574972.026550.0
0.576562.026310.0
0.578152.026070.0
0.579742.025830.0
0.581332.025590.0
0.582922.025350.0
0.584512.025120.0
0.58612.024890.0
0.587682.024660.0
0.589272.024430.0
0.590862.024210.0
0.592452.023980.0
0.594042.023760.0
0.595632.023540.0
0.597222.023320.0
0.598812.023110.0
0.600392.022890.0
0.601982.022680.0
0.603572.022470.0
0.605162.022260.0
0.606752.022060.0
0.608342.021850.0
0.609932.021650.0
0.611512.021450.0
0.61312.021250.0
0.614692.021050.0
0.616282.020860.0
0.617872.020660.0
0.619462.020470.0
0.621042.020280.0
0.622632.020090.0
0.624222.01990.0
0.625812.019710.0
0.62742.019530.0
0.628982.019340.0
0.630572.019160.0
0.632162.018980.0
0.633752.01880.0
0.635332.018620.0
0.636922.018440.0
0.638512.018270.0
0.64012.01810.0
0.641682.017920.0
0.643272.017750.0
0.644862.017580.0
0.646452.017420.0
0.648032.017250.0
0.649622.017080.0
0.651212.016920.0
0.65282.016760.0
0.654382.016590.0
0.655972.016430.0
0.657562.016270.0
0.659142.016120.0
0.660732.015960.0
0.662322.01580.0
0.66392.015650.0
0.665492.01550.0
0.667082.015340.0
0.668662.015190.0
0.670252.015040.0
0.671842.01490.0
0.673422.014750.0
0.675012.01460.0
0.676592.014460.0
0.678182.014310.0
0.679772.014170.0
0.681352.014030.0
0.682942.013890.0
0.684522.013750.0
0.686112.013610.0
0.68772.013470.0
0.689282.013330.0
0.690872.01320.0
0.692452.013060.0
0.694042.012930.0
0.695622.01280.0
0.697212.012660.0
0.698792.012530.0
0.700382.01240.0
0.701962.012270.0
0.703552.012150.0
0.705132.012020.0
0.706722.011890.0
0.70832.011770.0
0.709892.011640.0
0.711472.011520.0
0.713062.01140.0
0.714642.011270.0
0.716232.011150.0
0.717812.011030.0
0.71942.010910.0
0.720982.01080.0
0.722562.010680.0
0.724152.010560.0
0.725732.010440.0
0.727322.010330.0
0.72892.010220.0
0.730482.01010.0
0.732072.009990.0
0.733652.009880.0
0.735232.009770.0
0.736822.009650.0
0.73842.009550.0
0.739982.009440.0
0.741572.009330.0
0.743152.009220.0
0.744732.009110.0
0.746312.009010.0
0.74792.00890.0
0.749482.00880.0
0.751062.008690.0
0.752642.008590.0
0.754232.008490.0
0.755812.008390.0
0.757392.008280.0
0.758972.008180.0
0.760562.008080.0
0.762142.007980.0
0.763722.007890.0
0.76532.007790.0
0.766882.007690.0
0.768462.007590.0
0.770042.00750.0
0.771632.00740.0
0.773212.007310.0
0.774792.007210.0
0.776372.007120.0
0.777952.007030.0
0.779532.006930.0
0.781112.006840.0
0.782692.006750.0
0.784272.006660.0
0.785852.006570.0
0.787432.006480.0
0.789012.006390.0
0.790592.00630.0
0.792172.006220.0
0.793752.006130.0
0.795332.006040.0
0.796912.005960.0
0.798492.005870.0
0.800072.005780.0
0.801652.00570.0
0.803232.005620.0
0.804812.005530.0
0.806392.005450.0
0.807972.005370.0
0.809552.005290.0
0.811132.00520.0
0.81272.005120.0
0.814282.005040.0
0.815862.004960.0
0.817442.004880.0
0.819022.00480.0
0.820592.004730.0
0.822172.004650.0
0.823752.004570.0
0.825332.004490.0
0.826912.004420.0
0.828482.004340.0
0.830062.004260.0
0.831642.004190.0
0.833212.004110.0
0.834792.004040.0
0.836372.003970.0
0.837942.003890.0
0.839522.003820.0
0.84112.003750.0
0.842672.003670.0
0.844252.00360.0
0.845832.003530.0
0.84742.003460.0
0.848982.003390.0
0.850552.003320.0
0.852132.003250.0
0.85372.003180.0
0.855282.003110.0
0.856862.003040.0
0.858432.002980.0
0.860012.002910.0
0.861582.002840.0
0.863152.002770.0
0.864732.002710.0
0.86632.002640.0
0.867882.002580.0
0.869452.002510.0
0.871032.002440.0
0.87262.002380.0
0.874172.002320.0
0.875752.002250.0
0.877322.002190.0
0.878892.002130.0
0.880472.002060.0
0.882042.0020.0
0.883612.001940.0
0.885192.001880.0
0.886762.001810.0
0.888332.001750.0
0.88992.001690.0
0.891482.001630.0
0.893052.001570.0
0.894622.001510.0
0.896192.001450.0
0.897762.001390.0
0.899342.001340.0
0.900912.001280.0
0.902482.001220.0
0.904052.001160.0
0.905622.00110.0
0.907192.001050.0
0.908762.000990.0
0.910332.000930.0
0.91192.000880.0
0.913472.000820.0
0.915042.000760.0
0.916612.000710.0
0.918182.000650.0
0.919752.00060.0
0.921322.000550.0
0.922892.000490.0
0.924462.000440.0
0.926032.000380.0
0.92762.000330.0
0.929172.000280.0
0.930742.000220.0
0.93232.000170.0
0.933872.000120.0
0.935442.000070.0
0.937012.000020.0
0.938581.999960.0
0.940141.999910.0
0.941711.999860.0
0.943281.999810.0
0.944851.999760.0
0.946411.999710.0
0.947981.999660.0
0.949551.999610.0
0.951111.999560.0
0.952681.999510.0
0.954251.999470.0
0.955811.999420.0
0.957381.999370.0
0.958941.999320.0
0.960511.999270.0
0.962071.999230.0
0.963641.999180.0
0.96521.999130.0
0.966771.999080.0
0.968331.999040.0
0.96991.998990.0
0.971461.998950.0
0.973031.99890.0
0.974591.998850.0
0.976161.998810.0
0.977721.998760.0
0.979281.998720.0
0.980851.998670.0
0.982411.998630.0
0.983971.998590.0
0.985541.998540.0
0.98711.99850.0
0.988661.998450.0
0.990221.998410.0
0.991791.998370.0
0.993351.998320.0
0.994911.998280.0
0.996471.998240.0
0.998031.99820.0
0.999591.998160.0
1.010611.997860.0
1.0141.997780.0
1.01741.997690.0
1.02081.99760.0
1.024191.997520.0
1.027591.997430.0
1.030991.997350.0
1.034391.997270.0
1.037781.997190.0
1.041181.99710.0
1.044581.997020.0
1.047981.996940.0
1.051381.996870.0
1.054791.996790.0
1.058191.996710.0
1.061591.996630.0
1.064991.996560.0
1.068391.996480.0
1.07181.996410.0
1.07521.996340.0
1.07861.996260.0
1.082011.996190.0
1.085411.996120.0
1.088821.996050.0
1.092231.995980.0
1.095631.995910.0
1.099041.995840.0
1.102451.995770.0
1.105851.995710.0
1.109261.995640.0
1.112671.995570.0
1.116081.995510.0
1.119491.995440.0
1.12291.995380.0
1.126311.995310.0
1.129721.995250.0
1.133131.995190.0
1.136541.995120.0
1.139961.995060.0
1.143371.9950.0
1.146781.994940.0
1.15021.994880.0
1.153611.994820.0
1.157021.994760.0
1.160441.994710.0
1.163851.994650.0
1.167271.994590.0
1.170691.994530.0
1.17411.994480.0
1.177521.994420.0
1.180941.994370.0
1.184361.994310.0
1.187771.994260.0
1.191191.99420.0
1.194611.994150.0
1.198031.99410.0
1.201451.994040.0
1.204871.993990.0
1.208291.993940.0
1.211721.993890.0
1.215141.993840.0
1.218561.993790.0
1.221981.993740.0
1.225411.993690.0
1.228831.993640.0
1.232251.993590.0
1.235681.993540.0
1.23911.993490.0
1.242531.993450.0
1.245961.99340.0
1.249381.993350.0
1.252811.993310.0
1.256241.993260.0
1.259661.993220.0
1.263091.993170.0
1.266521.993130.0
1.269951.993080.0
1.273381.993040.0
1.276811.992990.0
1.280241.992950.0
1.283671.992910.0
1.28711.992860.0
1.290541.992820.0
1.293971.992780.0
1.29741.992740.0
1.300831.99270.0
1.304271.992660.0
1.30771.992610.0
1.311141.992570.0
1.314571.992530.0
1.318011.992490.0
1.321441.992450.0
1.324881.992420.0
1.328321.992380.0
1.331751.992340.0
1.335191.99230.0
1.338631.992260.0
1.342071.992220.0
1.345511.992190.0
1.348951.992150.0
1.352391.992110.0
1.355831.992080.0
1.359271.992040.0
1.362711.9920.0
1.366151.991970.0
1.369591.991930.0
1.373031.99190.0
1.376481.991860.0
1.379921.991830.0
1.383361.991790.0
1.386811.991760.0
1.390251.991730.0
1.39371.991690.0
1.397141.991660.0
1.400591.991630.0
1.404041.991590.0
1.407481.991560.0
1.410931.991530.0
1.414381.99150.0
1.417831.991460.0
1.421281.991430.0
1.424721.99140.0
1.428171.991370.0
1.431621.991340.0
1.435081.991310.0
1.438531.991280.0
1.441981.991250.0
1.445431.991220.0
1.448881.991190.0
1.452331.991160.0
1.455791.991130.0
1.459241.99110.0
1.46271.991070.0
1.466151.991040.0
1.46961.991010.0
1.473061.990980.0
1.476521.990950.0
1.479971.990930.0
1.483431.99090.0
1.486891.990870.0
1.490341.990840.0
1.49381.990820.0
1.497261.990790.0
1.500721.990760.0
1.504181.990730.0
1.507641.990710.0
1.51111.990680.0
1.514561.990660.0
1.518021.990630.0
1.521481.99060.0
1.524941.990580.0
1.528411.990550.0
1.531871.990530.0
1.535331.99050.0
1.53881.990480.0
1.542261.990450.0
1.545731.990430.0
1.549191.99040.0
1.552661.990380.0
1.556121.990350.0
1.559591.990330.0
1.563061.990310.0
1.566521.990280.0
1.569991.990260.0
1.573461.990240.0
1.576931.990210.0
1.58041.990190.0
1.583871.990170.0
1.587341.990140.0
1.590811.990120.0
1.594281.99010.0
1.597751.990080.0
1.601221.990050.0
1.604691.990030.0
1.608171.990010.0
1.611641.989990.0
1.615111.989970.0
1.618591.989940.0
1.622061.989920.0
1.625541.98990.0
1.629011.989880.0
1.632491.989860.0
1.635961.989840.0
1.639441.989820.0
1.642921.98980.0
1.64641.989780.0
1.649871.989760.0
1.653351.989740.0
1.656831.989720.0
1.660311.98970.0
1.663791.989680.0
1.667271.989660.0
1.670751.989640.0
1.674231.989620.0
1.677711.98960.0
1.68121.989580.0
1.684681.989560.0
1.688161.989540.0

Optical transmission calculator

Free-standing sample in vacuum, normal incidence
Method
Transmittance T
—
Reflectance R
—

Fresnel reflection calculator

Direction
Rp
—
Rs
—
R = (Rp+Rs)/2
—
Phase φp
—
Phase φs
—
Brewster angle θB
—
Critical angle θC
—