Optical constants
Refractive index of Si3N4, SiN (Silicon nitride)
Beliaev et al. 2022: Non-stoichiometric SiN; n,k 0.21-1.7 µm
- Data
- tabulated nk
- Range
- 0.2114–1.688 µm
- Points
- 697
- Licence
- CC0-1.0
Plot
Click the plot to set the calculator wavelength.
At one wavelength
- Refractive index n
- 2.02467
- Extinction coefficient k
- 0
- Permittivity ε1
- 4.0993
- Permittivity ε2
- 0
- Absorption coefficient α
- 0 cm⁻¹
- Penetration depth δ = λ/(2πk)
- — nm
- Abbe number Vd
- —
- Chromatic dispersion dn/dλ
- -0.14557 µm⁻¹
- Group index ng
- 2.11021
- Group velocity dispersion
- — fs²/mm
- Dispersion parameter D
- — ps/(nm·km)
- Photon energy
- 2.11001 eV
ε = (n + ik)², α = 4πk/λ, ng = n − λ dn/dλ, GVD = λ³/(2πc²) d²n/dλ², D = −(λ/c) d²n/dλ². Group-velocity dispersion is given for formula data only.
Use it in Lightsmith
Load this data in Python, simulate in one more line
pip install lightsmith
import lightsmith as ls
# Si3N4, SiN (Silicon nitride): Beliaev et al. 2022: Non-stoichiometric SiN; n,k 0.21-1.7 µm
si3n4_sin = ls.fetch_refractiveindex("main", "Si3N4", "Beliaev", ref="c5c2f188e848453def5970e347399d653df2ffc2")
print(si3n4_sin.range_nm) # (211.4, 1688.16) nm
eps = si3n4_sin.eps([633]) # complex permittivity
Downloads the original record once (pinned to the imported snapshot) and caches it.
import json, urllib.request
import lightsmith as ls
url = "https://materials.lightsmith.dev/v1/datasets/ds_7b33d0ae219d/lightsmith"
si3n4_sin = ls.Tabulated.model_validate(json.load(urllib.request.urlopen(url)))
print(si3n4_sin.source) # citation and provenance travel with the data
Any dataset here, as the library's Tabulated material (si3n4/beliaev-2022).
# ... load si3n4_sin as above, then:
sim = ls.Simulation(
particles=[ls.Particle(shape=ls.Sphere(radius_nm=50), material=si3n4_sin)],
medium_index=1.0,
wavelengths=ls.WavelengthRange(start_nm=400, stop_nm=1000, num=81),
)
res = ls.solve(sim) # exact Mie for a sphere
print(res.q_ext) # extinction efficiency at each wavelength
Same spec runs with DDA, FDTD, BEM or T-matrix: ls.compare(sim, ["mie", "dda"]).
Lightsmith is open source (MIT): Mie, T-matrix, BEM, DDA, FDTD, RCWA, TMM, mode solvers and inverse design behind one spec, on CPU or GPU. GitHub.
Comments and conditions
Conditions
- film thickness
- 100e-9
- substrate
- Si
References
- doi:10.1016/j.tsf.2022.139568 Optical, structural and composition properties of silicon nitride films deposited by reactive radio-frequency sputtering, low pressure and plasma-enhanced chemical vapor deposition, Thin Solid Films (2022)
Cite
Leonid Yu. Beliaev, Evgeniy Shkondin, Andrei V. Lavrinenko and Osamu Takayama. Optical, structural and composition properties of silicon nitride films deposited by reactive radio-frequency sputtering, low pressure and plasma-enhanced chemical vapor deposition. Thin Solid Films, 763, 139568 (2022), doi:10.1016/j.tsf.2022.139568; Data from the refractiveindex.info database (M. N. Polyanskiy, Sci. Data 11, 94 (2024), doi:10.1038/s41597-023-02898-2)
Data
697 rows as published| λ (µm) | n | k |
|---|---|---|
| 0.2114 | 2.52782 | 0.159962 |
| 0.21298 | 2.51768 | 0.150938 |
| 0.21456 | 2.5077 | 0.142345 |
| 0.21614 | 2.49788 | 0.134161 |
| 0.21772 | 2.48823 | 0.126366 |
| 0.2193 | 2.47874 | 0.118942 |
| 0.22089 | 2.46941 | 0.11187 |
| 0.22247 | 2.46025 | 0.105135 |
| 0.22405 | 2.45124 | 0.0987212 |
| 0.22563 | 2.44239 | 0.0926139 |
| 0.22721 | 2.4337 | 0.0867992 |
| 0.2288 | 2.42517 | 0.0812643 |
| 0.23038 | 2.41679 | 0.0759968 |
| 0.23196 | 2.40856 | 0.0709853 |
| 0.23354 | 2.40047 | 0.0662188 |
| 0.23513 | 2.39254 | 0.0616872 |
| 0.23671 | 2.38475 | 0.0573806 |
| 0.23829 | 2.37711 | 0.05329 |
| 0.23987 | 2.3696 | 0.0494066 |
| 0.24146 | 2.36223 | 0.0457222 |
| 0.24304 | 2.35501 | 0.042229 |
| 0.24462 | 2.34791 | 0.0389197 |
| 0.24621 | 2.34095 | 0.0357874 |
| 0.24779 | 2.33412 | 0.0328252 |
| 0.24937 | 2.32742 | 0.030027 |
| 0.25096 | 2.32085 | 0.0273867 |
| 0.25254 | 2.3144 | 0.0248991 |
| 0.25412 | 2.30808 | 0.0225581 |
| 0.25571 | 2.30188 | 0.0203592 |
| 0.25729 | 2.2958 | 0.0182973 |
| 0.25887 | 2.28984 | 0.0163677 |
| 0.26046 | 2.284 | 0.0145661 |
| 0.26204 | 2.27828 | 0.012888 |
| 0.26363 | 2.27267 | 0.0113298 |
| 0.26521 | 2.26718 | 0.0098874 |
| 0.2668 | 2.2618 | 0.00855734 |
| 0.26838 | 2.25654 | 0.0073358 |
| 0.26996 | 2.25138 | 0.00621973 |
| 0.27155 | 2.24634 | 0.00520602 |
| 0.27313 | 2.24141 | 0.00429126 |
| 0.27472 | 2.2366 | 0.00347269 |
| 0.2763 | 2.23189 | 0.00274744 |
| 0.27789 | 2.2273 | 0.0021131 |
| 0.27947 | 2.22282 | 0.0015667 |
| 0.28106 | 2.21845 | 0.00110595 |
| 0.28264 | 2.2142 | 0.000728479 |
| 0.28423 | 2.21007 | 0.000431887 |
| 0.28581 | 2.20606 | 0.000214183 |
| 0.2874 | 2.20217 | 7.28827e-05 |
| 0.28898 | 2.19842 | 6.14076e-06 |
| 0.29057 | 2.19484 | 0.0 |
| 0.29215 | 2.19141 | 0.0 |
| 0.29374 | 2.18811 | 0.0 |
| 0.29533 | 2.18492 | 0.0 |
| 0.29691 | 2.18183 | 0.0 |
| 0.2985 | 2.17883 | 0.0 |
| 0.30008 | 2.17592 | 0.0 |
| 0.30167 | 2.17309 | 0.0 |
| 0.30325 | 2.17034 | 0.0 |
| 0.30484 | 2.16766 | 0.0 |
| 0.30643 | 2.16506 | 0.0 |
| 0.30801 | 2.16252 | 0.0 |
| 0.3096 | 2.16004 | 0.0 |
| 0.31119 | 2.15763 | 0.0 |
| 0.31277 | 2.15527 | 0.0 |
| 0.31436 | 2.15297 | 0.0 |
| 0.31595 | 2.15073 | 0.0 |
| 0.31753 | 2.14853 | 0.0 |
| 0.31912 | 2.14639 | 0.0 |
| 0.3207 | 2.14429 | 0.0 |
| 0.32229 | 2.14224 | 0.0 |
| 0.32388 | 2.14024 | 0.0 |
| 0.32547 | 2.13828 | 0.0 |
| 0.32705 | 2.13636 | 0.0 |
| 0.32864 | 2.13448 | 0.0 |
| 0.33023 | 2.13264 | 0.0 |
| 0.33181 | 2.13083 | 0.0 |
| 0.3334 | 2.12907 | 0.0 |
| 0.33499 | 2.12734 | 0.0 |
| 0.33658 | 2.12564 | 0.0 |
| 0.33816 | 2.12398 | 0.0 |
| 0.33975 | 2.12235 | 0.0 |
| 0.34134 | 2.12075 | 0.0 |
| 0.34292 | 2.11918 | 0.0 |
| 0.34451 | 2.11764 | 0.0 |
| 0.3461 | 2.11614 | 0.0 |
| 0.34769 | 2.11465 | 0.0 |
| 0.34928 | 2.1132 | 0.0 |
| 0.35086 | 2.11177 | 0.0 |
| 0.35245 | 2.11037 | 0.0 |
| 0.35404 | 2.109 | 0.0 |
| 0.35563 | 2.10764 | 0.0 |
| 0.35721 | 2.10632 | 0.0 |
| 0.3588 | 2.10501 | 0.0 |
| 0.36039 | 2.10373 | 0.0 |
| 0.36198 | 2.10247 | 0.0 |
| 0.36357 | 2.10123 | 0.0 |
| 0.36515 | 2.10001 | 0.0 |
| 0.36674 | 2.09882 | 0.0 |
| 0.36833 | 2.09764 | 0.0 |
| 0.36992 | 2.09648 | 0.0 |
| 0.37151 | 2.09534 | 0.0 |
| 0.3731 | 2.09422 | 0.0 |
| 0.37468 | 2.09312 | 0.0 |
| 0.37627 | 2.09204 | 0.0 |
| 0.37786 | 2.09097 | 0.0 |
| 0.37945 | 2.08992 | 0.0 |
| 0.38104 | 2.08889 | 0.0 |
| 0.38263 | 2.08787 | 0.0 |
| 0.38422 | 2.08687 | 0.0 |
| 0.38581 | 2.08589 | 0.0 |
| 0.38739 | 2.08492 | 0.0 |
| 0.38898 | 2.08396 | 0.0 |
| 0.39057 | 2.08302 | 0.0 |
| 0.39216 | 2.08209 | 0.0 |
| 0.39375 | 2.08118 | 0.0 |
| 0.39534 | 2.08028 | 0.0 |
| 0.39693 | 2.07939 | 0.0 |
| 0.39852 | 2.07852 | 0.0 |
| 0.40011 | 2.07766 | 0.0 |
| 0.40169 | 2.07681 | 0.0 |
| 0.40328 | 2.07598 | 0.0 |
| 0.40487 | 2.07515 | 0.0 |
| 0.40646 | 2.07434 | 0.0 |
| 0.40805 | 2.07354 | 0.0 |
| 0.40964 | 2.07275 | 0.0 |
| 0.41123 | 2.07197 | 0.0 |
| 0.41282 | 2.07121 | 0.0 |
| 0.41441 | 2.07045 | 0.0 |
| 0.416 | 2.0697 | 0.0 |
| 0.41759 | 2.06897 | 0.0 |
| 0.41918 | 2.06824 | 0.0 |
| 0.42077 | 2.06753 | 0.0 |
| 0.42235 | 2.06682 | 0.0 |
| 0.42394 | 2.06612 | 0.0 |
| 0.42553 | 2.06544 | 0.0 |
| 0.42712 | 2.06476 | 0.0 |
| 0.42871 | 2.06409 | 0.0 |
| 0.4303 | 2.06343 | 0.0 |
| 0.43189 | 2.06277 | 0.0 |
| 0.43348 | 2.06213 | 0.0 |
| 0.43507 | 2.0615 | 0.0 |
| 0.43666 | 2.06087 | 0.0 |
| 0.43825 | 2.06025 | 0.0 |
| 0.43984 | 2.05964 | 0.0 |
| 0.44143 | 2.05903 | 0.0 |
| 0.44302 | 2.05844 | 0.0 |
| 0.44461 | 2.05785 | 0.0 |
| 0.4462 | 2.05727 | 0.0 |
| 0.44779 | 2.05669 | 0.0 |
| 0.44938 | 2.05613 | 0.0 |
| 0.45097 | 2.05557 | 0.0 |
| 0.45256 | 2.05501 | 0.0 |
| 0.45415 | 2.05447 | 0.0 |
| 0.45574 | 2.05393 | 0.0 |
| 0.45733 | 2.0534 | 0.0 |
| 0.45892 | 2.05287 | 0.0 |
| 0.46051 | 2.05235 | 0.0 |
| 0.4621 | 2.05183 | 0.0 |
| 0.46369 | 2.05133 | 0.0 |
| 0.46528 | 2.05082 | 0.0 |
| 0.46687 | 2.05033 | 0.0 |
| 0.46846 | 2.04984 | 0.0 |
| 0.47005 | 2.04935 | 0.0 |
| 0.47164 | 2.04887 | 0.0 |
| 0.47323 | 2.0484 | 0.0 |
| 0.47482 | 2.04793 | 0.0 |
| 0.47641 | 2.04747 | 0.0 |
| 0.478 | 2.04701 | 0.0 |
| 0.47959 | 2.04656 | 0.0 |
| 0.48118 | 2.04611 | 0.0 |
| 0.48277 | 2.04567 | 0.0 |
| 0.48436 | 2.04523 | 0.0 |
| 0.48595 | 2.0448 | 0.0 |
| 0.48754 | 2.04437 | 0.0 |
| 0.48913 | 2.04395 | 0.0 |
| 0.49072 | 2.04353 | 0.0 |
| 0.49231 | 2.04312 | 0.0 |
| 0.4939 | 2.04271 | 0.0 |
| 0.49549 | 2.0423 | 0.0 |
| 0.49708 | 2.0419 | 0.0 |
| 0.49867 | 2.04151 | 0.0 |
| 0.50026 | 2.04111 | 0.0 |
| 0.50185 | 2.04073 | 0.0 |
| 0.50344 | 2.04034 | 0.0 |
| 0.50503 | 2.03996 | 0.0 |
| 0.50662 | 2.03959 | 0.0 |
| 0.50821 | 2.03922 | 0.0 |
| 0.5098 | 2.03885 | 0.0 |
| 0.51139 | 2.03849 | 0.0 |
| 0.51298 | 2.03813 | 0.0 |
| 0.51457 | 2.03777 | 0.0 |
| 0.51616 | 2.03742 | 0.0 |
| 0.51775 | 2.03707 | 0.0 |
| 0.51934 | 2.03672 | 0.0 |
| 0.52093 | 2.03638 | 0.0 |
| 0.52252 | 2.03604 | 0.0 |
| 0.52411 | 2.03571 | 0.0 |
| 0.52569 | 2.03538 | 0.0 |
| 0.52728 | 2.03505 | 0.0 |
| 0.52887 | 2.03472 | 0.0 |
| 0.53046 | 2.0344 | 0.0 |
| 0.53205 | 2.03408 | 0.0 |
| 0.53364 | 2.03377 | 0.0 |
| 0.53523 | 2.03346 | 0.0 |
| 0.53682 | 2.03315 | 0.0 |
| 0.53841 | 2.03284 | 0.0 |
| 0.54 | 2.03254 | 0.0 |
| 0.54159 | 2.03224 | 0.0 |
| 0.54318 | 2.03194 | 0.0 |
| 0.54477 | 2.03165 | 0.0 |
| 0.54636 | 2.03135 | 0.0 |
| 0.54795 | 2.03106 | 0.0 |
| 0.54954 | 2.03078 | 0.0 |
| 0.55113 | 2.0305 | 0.0 |
| 0.55272 | 2.03022 | 0.0 |
| 0.55431 | 2.02994 | 0.0 |
| 0.5559 | 2.02966 | 0.0 |
| 0.55749 | 2.02939 | 0.0 |
| 0.55908 | 2.02912 | 0.0 |
| 0.56067 | 2.02885 | 0.0 |
| 0.56226 | 2.02859 | 0.0 |
| 0.56385 | 2.02832 | 0.0 |
| 0.56544 | 2.02806 | 0.0 |
| 0.56703 | 2.02781 | 0.0 |
| 0.56861 | 2.02755 | 0.0 |
| 0.5702 | 2.0273 | 0.0 |
| 0.57179 | 2.02705 | 0.0 |
| 0.57338 | 2.0268 | 0.0 |
| 0.57497 | 2.02655 | 0.0 |
| 0.57656 | 2.02631 | 0.0 |
| 0.57815 | 2.02607 | 0.0 |
| 0.57974 | 2.02583 | 0.0 |
| 0.58133 | 2.02559 | 0.0 |
| 0.58292 | 2.02535 | 0.0 |
| 0.58451 | 2.02512 | 0.0 |
| 0.5861 | 2.02489 | 0.0 |
| 0.58768 | 2.02466 | 0.0 |
| 0.58927 | 2.02443 | 0.0 |
| 0.59086 | 2.02421 | 0.0 |
| 0.59245 | 2.02398 | 0.0 |
| 0.59404 | 2.02376 | 0.0 |
| 0.59563 | 2.02354 | 0.0 |
| 0.59722 | 2.02332 | 0.0 |
| 0.59881 | 2.02311 | 0.0 |
| 0.60039 | 2.02289 | 0.0 |
| 0.60198 | 2.02268 | 0.0 |
| 0.60357 | 2.02247 | 0.0 |
| 0.60516 | 2.02226 | 0.0 |
| 0.60675 | 2.02206 | 0.0 |
| 0.60834 | 2.02185 | 0.0 |
| 0.60993 | 2.02165 | 0.0 |
| 0.61151 | 2.02145 | 0.0 |
| 0.6131 | 2.02125 | 0.0 |
| 0.61469 | 2.02105 | 0.0 |
| 0.61628 | 2.02086 | 0.0 |
| 0.61787 | 2.02066 | 0.0 |
| 0.61946 | 2.02047 | 0.0 |
| 0.62104 | 2.02028 | 0.0 |
| 0.62263 | 2.02009 | 0.0 |
| 0.62422 | 2.0199 | 0.0 |
| 0.62581 | 2.01971 | 0.0 |
| 0.6274 | 2.01953 | 0.0 |
| 0.62898 | 2.01934 | 0.0 |
| 0.63057 | 2.01916 | 0.0 |
| 0.63216 | 2.01898 | 0.0 |
| 0.63375 | 2.0188 | 0.0 |
| 0.63533 | 2.01862 | 0.0 |
| 0.63692 | 2.01844 | 0.0 |
| 0.63851 | 2.01827 | 0.0 |
| 0.6401 | 2.0181 | 0.0 |
| 0.64168 | 2.01792 | 0.0 |
| 0.64327 | 2.01775 | 0.0 |
| 0.64486 | 2.01758 | 0.0 |
| 0.64645 | 2.01742 | 0.0 |
| 0.64803 | 2.01725 | 0.0 |
| 0.64962 | 2.01708 | 0.0 |
| 0.65121 | 2.01692 | 0.0 |
| 0.6528 | 2.01676 | 0.0 |
| 0.65438 | 2.01659 | 0.0 |
| 0.65597 | 2.01643 | 0.0 |
| 0.65756 | 2.01627 | 0.0 |
| 0.65914 | 2.01612 | 0.0 |
| 0.66073 | 2.01596 | 0.0 |
| 0.66232 | 2.0158 | 0.0 |
| 0.6639 | 2.01565 | 0.0 |
| 0.66549 | 2.0155 | 0.0 |
| 0.66708 | 2.01534 | 0.0 |
| 0.66866 | 2.01519 | 0.0 |
| 0.67025 | 2.01504 | 0.0 |
| 0.67184 | 2.0149 | 0.0 |
| 0.67342 | 2.01475 | 0.0 |
| 0.67501 | 2.0146 | 0.0 |
| 0.67659 | 2.01446 | 0.0 |
| 0.67818 | 2.01431 | 0.0 |
| 0.67977 | 2.01417 | 0.0 |
| 0.68135 | 2.01403 | 0.0 |
| 0.68294 | 2.01389 | 0.0 |
| 0.68452 | 2.01375 | 0.0 |
| 0.68611 | 2.01361 | 0.0 |
| 0.6877 | 2.01347 | 0.0 |
| 0.68928 | 2.01333 | 0.0 |
| 0.69087 | 2.0132 | 0.0 |
| 0.69245 | 2.01306 | 0.0 |
| 0.69404 | 2.01293 | 0.0 |
| 0.69562 | 2.0128 | 0.0 |
| 0.69721 | 2.01266 | 0.0 |
| 0.69879 | 2.01253 | 0.0 |
| 0.70038 | 2.0124 | 0.0 |
| 0.70196 | 2.01227 | 0.0 |
| 0.70355 | 2.01215 | 0.0 |
| 0.70513 | 2.01202 | 0.0 |
| 0.70672 | 2.01189 | 0.0 |
| 0.7083 | 2.01177 | 0.0 |
| 0.70989 | 2.01164 | 0.0 |
| 0.71147 | 2.01152 | 0.0 |
| 0.71306 | 2.0114 | 0.0 |
| 0.71464 | 2.01127 | 0.0 |
| 0.71623 | 2.01115 | 0.0 |
| 0.71781 | 2.01103 | 0.0 |
| 0.7194 | 2.01091 | 0.0 |
| 0.72098 | 2.0108 | 0.0 |
| 0.72256 | 2.01068 | 0.0 |
| 0.72415 | 2.01056 | 0.0 |
| 0.72573 | 2.01044 | 0.0 |
| 0.72732 | 2.01033 | 0.0 |
| 0.7289 | 2.01022 | 0.0 |
| 0.73048 | 2.0101 | 0.0 |
| 0.73207 | 2.00999 | 0.0 |
| 0.73365 | 2.00988 | 0.0 |
| 0.73523 | 2.00977 | 0.0 |
| 0.73682 | 2.00965 | 0.0 |
| 0.7384 | 2.00955 | 0.0 |
| 0.73998 | 2.00944 | 0.0 |
| 0.74157 | 2.00933 | 0.0 |
| 0.74315 | 2.00922 | 0.0 |
| 0.74473 | 2.00911 | 0.0 |
| 0.74631 | 2.00901 | 0.0 |
| 0.7479 | 2.0089 | 0.0 |
| 0.74948 | 2.0088 | 0.0 |
| 0.75106 | 2.00869 | 0.0 |
| 0.75264 | 2.00859 | 0.0 |
| 0.75423 | 2.00849 | 0.0 |
| 0.75581 | 2.00839 | 0.0 |
| 0.75739 | 2.00828 | 0.0 |
| 0.75897 | 2.00818 | 0.0 |
| 0.76056 | 2.00808 | 0.0 |
| 0.76214 | 2.00798 | 0.0 |
| 0.76372 | 2.00789 | 0.0 |
| 0.7653 | 2.00779 | 0.0 |
| 0.76688 | 2.00769 | 0.0 |
| 0.76846 | 2.00759 | 0.0 |
| 0.77004 | 2.0075 | 0.0 |
| 0.77163 | 2.0074 | 0.0 |
| 0.77321 | 2.00731 | 0.0 |
| 0.77479 | 2.00721 | 0.0 |
| 0.77637 | 2.00712 | 0.0 |
| 0.77795 | 2.00703 | 0.0 |
| 0.77953 | 2.00693 | 0.0 |
| 0.78111 | 2.00684 | 0.0 |
| 0.78269 | 2.00675 | 0.0 |
| 0.78427 | 2.00666 | 0.0 |
| 0.78585 | 2.00657 | 0.0 |
| 0.78743 | 2.00648 | 0.0 |
| 0.78901 | 2.00639 | 0.0 |
| 0.79059 | 2.0063 | 0.0 |
| 0.79217 | 2.00622 | 0.0 |
| 0.79375 | 2.00613 | 0.0 |
| 0.79533 | 2.00604 | 0.0 |
| 0.79691 | 2.00596 | 0.0 |
| 0.79849 | 2.00587 | 0.0 |
| 0.80007 | 2.00578 | 0.0 |
| 0.80165 | 2.0057 | 0.0 |
| 0.80323 | 2.00562 | 0.0 |
| 0.80481 | 2.00553 | 0.0 |
| 0.80639 | 2.00545 | 0.0 |
| 0.80797 | 2.00537 | 0.0 |
| 0.80955 | 2.00529 | 0.0 |
| 0.81113 | 2.0052 | 0.0 |
| 0.8127 | 2.00512 | 0.0 |
| 0.81428 | 2.00504 | 0.0 |
| 0.81586 | 2.00496 | 0.0 |
| 0.81744 | 2.00488 | 0.0 |
| 0.81902 | 2.0048 | 0.0 |
| 0.82059 | 2.00473 | 0.0 |
| 0.82217 | 2.00465 | 0.0 |
| 0.82375 | 2.00457 | 0.0 |
| 0.82533 | 2.00449 | 0.0 |
| 0.82691 | 2.00442 | 0.0 |
| 0.82848 | 2.00434 | 0.0 |
| 0.83006 | 2.00426 | 0.0 |
| 0.83164 | 2.00419 | 0.0 |
| 0.83321 | 2.00411 | 0.0 |
| 0.83479 | 2.00404 | 0.0 |
| 0.83637 | 2.00397 | 0.0 |
| 0.83794 | 2.00389 | 0.0 |
| 0.83952 | 2.00382 | 0.0 |
| 0.8411 | 2.00375 | 0.0 |
| 0.84267 | 2.00367 | 0.0 |
| 0.84425 | 2.0036 | 0.0 |
| 0.84583 | 2.00353 | 0.0 |
| 0.8474 | 2.00346 | 0.0 |
| 0.84898 | 2.00339 | 0.0 |
| 0.85055 | 2.00332 | 0.0 |
| 0.85213 | 2.00325 | 0.0 |
| 0.8537 | 2.00318 | 0.0 |
| 0.85528 | 2.00311 | 0.0 |
| 0.85686 | 2.00304 | 0.0 |
| 0.85843 | 2.00298 | 0.0 |
| 0.86001 | 2.00291 | 0.0 |
| 0.86158 | 2.00284 | 0.0 |
| 0.86315 | 2.00277 | 0.0 |
| 0.86473 | 2.00271 | 0.0 |
| 0.8663 | 2.00264 | 0.0 |
| 0.86788 | 2.00258 | 0.0 |
| 0.86945 | 2.00251 | 0.0 |
| 0.87103 | 2.00244 | 0.0 |
| 0.8726 | 2.00238 | 0.0 |
| 0.87417 | 2.00232 | 0.0 |
| 0.87575 | 2.00225 | 0.0 |
| 0.87732 | 2.00219 | 0.0 |
| 0.87889 | 2.00213 | 0.0 |
| 0.88047 | 2.00206 | 0.0 |
| 0.88204 | 2.002 | 0.0 |
| 0.88361 | 2.00194 | 0.0 |
| 0.88519 | 2.00188 | 0.0 |
| 0.88676 | 2.00181 | 0.0 |
| 0.88833 | 2.00175 | 0.0 |
| 0.8899 | 2.00169 | 0.0 |
| 0.89148 | 2.00163 | 0.0 |
| 0.89305 | 2.00157 | 0.0 |
| 0.89462 | 2.00151 | 0.0 |
| 0.89619 | 2.00145 | 0.0 |
| 0.89776 | 2.00139 | 0.0 |
| 0.89934 | 2.00134 | 0.0 |
| 0.90091 | 2.00128 | 0.0 |
| 0.90248 | 2.00122 | 0.0 |
| 0.90405 | 2.00116 | 0.0 |
| 0.90562 | 2.0011 | 0.0 |
| 0.90719 | 2.00105 | 0.0 |
| 0.90876 | 2.00099 | 0.0 |
| 0.91033 | 2.00093 | 0.0 |
| 0.9119 | 2.00088 | 0.0 |
| 0.91347 | 2.00082 | 0.0 |
| 0.91504 | 2.00076 | 0.0 |
| 0.91661 | 2.00071 | 0.0 |
| 0.91818 | 2.00065 | 0.0 |
| 0.91975 | 2.0006 | 0.0 |
| 0.92132 | 2.00055 | 0.0 |
| 0.92289 | 2.00049 | 0.0 |
| 0.92446 | 2.00044 | 0.0 |
| 0.92603 | 2.00038 | 0.0 |
| 0.9276 | 2.00033 | 0.0 |
| 0.92917 | 2.00028 | 0.0 |
| 0.93074 | 2.00022 | 0.0 |
| 0.9323 | 2.00017 | 0.0 |
| 0.93387 | 2.00012 | 0.0 |
| 0.93544 | 2.00007 | 0.0 |
| 0.93701 | 2.00002 | 0.0 |
| 0.93858 | 1.99996 | 0.0 |
| 0.94014 | 1.99991 | 0.0 |
| 0.94171 | 1.99986 | 0.0 |
| 0.94328 | 1.99981 | 0.0 |
| 0.94485 | 1.99976 | 0.0 |
| 0.94641 | 1.99971 | 0.0 |
| 0.94798 | 1.99966 | 0.0 |
| 0.94955 | 1.99961 | 0.0 |
| 0.95111 | 1.99956 | 0.0 |
| 0.95268 | 1.99951 | 0.0 |
| 0.95425 | 1.99947 | 0.0 |
| 0.95581 | 1.99942 | 0.0 |
| 0.95738 | 1.99937 | 0.0 |
| 0.95894 | 1.99932 | 0.0 |
| 0.96051 | 1.99927 | 0.0 |
| 0.96207 | 1.99923 | 0.0 |
| 0.96364 | 1.99918 | 0.0 |
| 0.9652 | 1.99913 | 0.0 |
| 0.96677 | 1.99908 | 0.0 |
| 0.96833 | 1.99904 | 0.0 |
| 0.9699 | 1.99899 | 0.0 |
| 0.97146 | 1.99895 | 0.0 |
| 0.97303 | 1.9989 | 0.0 |
| 0.97459 | 1.99885 | 0.0 |
| 0.97616 | 1.99881 | 0.0 |
| 0.97772 | 1.99876 | 0.0 |
| 0.97928 | 1.99872 | 0.0 |
| 0.98085 | 1.99867 | 0.0 |
| 0.98241 | 1.99863 | 0.0 |
| 0.98397 | 1.99859 | 0.0 |
| 0.98554 | 1.99854 | 0.0 |
| 0.9871 | 1.9985 | 0.0 |
| 0.98866 | 1.99845 | 0.0 |
| 0.99022 | 1.99841 | 0.0 |
| 0.99179 | 1.99837 | 0.0 |
| 0.99335 | 1.99832 | 0.0 |
| 0.99491 | 1.99828 | 0.0 |
| 0.99647 | 1.99824 | 0.0 |
| 0.99803 | 1.9982 | 0.0 |
| 0.99959 | 1.99816 | 0.0 |
| 1.01061 | 1.99786 | 0.0 |
| 1.014 | 1.99778 | 0.0 |
| 1.0174 | 1.99769 | 0.0 |
| 1.0208 | 1.9976 | 0.0 |
| 1.02419 | 1.99752 | 0.0 |
| 1.02759 | 1.99743 | 0.0 |
| 1.03099 | 1.99735 | 0.0 |
| 1.03439 | 1.99727 | 0.0 |
| 1.03778 | 1.99719 | 0.0 |
| 1.04118 | 1.9971 | 0.0 |
| 1.04458 | 1.99702 | 0.0 |
| 1.04798 | 1.99694 | 0.0 |
| 1.05138 | 1.99687 | 0.0 |
| 1.05479 | 1.99679 | 0.0 |
| 1.05819 | 1.99671 | 0.0 |
| 1.06159 | 1.99663 | 0.0 |
| 1.06499 | 1.99656 | 0.0 |
| 1.06839 | 1.99648 | 0.0 |
| 1.0718 | 1.99641 | 0.0 |
| 1.0752 | 1.99634 | 0.0 |
| 1.0786 | 1.99626 | 0.0 |
| 1.08201 | 1.99619 | 0.0 |
| 1.08541 | 1.99612 | 0.0 |
| 1.08882 | 1.99605 | 0.0 |
| 1.09223 | 1.99598 | 0.0 |
| 1.09563 | 1.99591 | 0.0 |
| 1.09904 | 1.99584 | 0.0 |
| 1.10245 | 1.99577 | 0.0 |
| 1.10585 | 1.99571 | 0.0 |
| 1.10926 | 1.99564 | 0.0 |
| 1.11267 | 1.99557 | 0.0 |
| 1.11608 | 1.99551 | 0.0 |
| 1.11949 | 1.99544 | 0.0 |
| 1.1229 | 1.99538 | 0.0 |
| 1.12631 | 1.99531 | 0.0 |
| 1.12972 | 1.99525 | 0.0 |
| 1.13313 | 1.99519 | 0.0 |
| 1.13654 | 1.99512 | 0.0 |
| 1.13996 | 1.99506 | 0.0 |
| 1.14337 | 1.995 | 0.0 |
| 1.14678 | 1.99494 | 0.0 |
| 1.1502 | 1.99488 | 0.0 |
| 1.15361 | 1.99482 | 0.0 |
| 1.15702 | 1.99476 | 0.0 |
| 1.16044 | 1.99471 | 0.0 |
| 1.16385 | 1.99465 | 0.0 |
| 1.16727 | 1.99459 | 0.0 |
| 1.17069 | 1.99453 | 0.0 |
| 1.1741 | 1.99448 | 0.0 |
| 1.17752 | 1.99442 | 0.0 |
| 1.18094 | 1.99437 | 0.0 |
| 1.18436 | 1.99431 | 0.0 |
| 1.18777 | 1.99426 | 0.0 |
| 1.19119 | 1.9942 | 0.0 |
| 1.19461 | 1.99415 | 0.0 |
| 1.19803 | 1.9941 | 0.0 |
| 1.20145 | 1.99404 | 0.0 |
| 1.20487 | 1.99399 | 0.0 |
| 1.20829 | 1.99394 | 0.0 |
| 1.21172 | 1.99389 | 0.0 |
| 1.21514 | 1.99384 | 0.0 |
| 1.21856 | 1.99379 | 0.0 |
| 1.22198 | 1.99374 | 0.0 |
| 1.22541 | 1.99369 | 0.0 |
| 1.22883 | 1.99364 | 0.0 |
| 1.23225 | 1.99359 | 0.0 |
| 1.23568 | 1.99354 | 0.0 |
| 1.2391 | 1.99349 | 0.0 |
| 1.24253 | 1.99345 | 0.0 |
| 1.24596 | 1.9934 | 0.0 |
| 1.24938 | 1.99335 | 0.0 |
| 1.25281 | 1.99331 | 0.0 |
| 1.25624 | 1.99326 | 0.0 |
| 1.25966 | 1.99322 | 0.0 |
| 1.26309 | 1.99317 | 0.0 |
| 1.26652 | 1.99313 | 0.0 |
| 1.26995 | 1.99308 | 0.0 |
| 1.27338 | 1.99304 | 0.0 |
| 1.27681 | 1.99299 | 0.0 |
| 1.28024 | 1.99295 | 0.0 |
| 1.28367 | 1.99291 | 0.0 |
| 1.2871 | 1.99286 | 0.0 |
| 1.29054 | 1.99282 | 0.0 |
| 1.29397 | 1.99278 | 0.0 |
| 1.2974 | 1.99274 | 0.0 |
| 1.30083 | 1.9927 | 0.0 |
| 1.30427 | 1.99266 | 0.0 |
| 1.3077 | 1.99261 | 0.0 |
| 1.31114 | 1.99257 | 0.0 |
| 1.31457 | 1.99253 | 0.0 |
| 1.31801 | 1.99249 | 0.0 |
| 1.32144 | 1.99245 | 0.0 |
| 1.32488 | 1.99242 | 0.0 |
| 1.32832 | 1.99238 | 0.0 |
| 1.33175 | 1.99234 | 0.0 |
| 1.33519 | 1.9923 | 0.0 |
| 1.33863 | 1.99226 | 0.0 |
| 1.34207 | 1.99222 | 0.0 |
| 1.34551 | 1.99219 | 0.0 |
| 1.34895 | 1.99215 | 0.0 |
| 1.35239 | 1.99211 | 0.0 |
| 1.35583 | 1.99208 | 0.0 |
| 1.35927 | 1.99204 | 0.0 |
| 1.36271 | 1.992 | 0.0 |
| 1.36615 | 1.99197 | 0.0 |
| 1.36959 | 1.99193 | 0.0 |
| 1.37303 | 1.9919 | 0.0 |
| 1.37648 | 1.99186 | 0.0 |
| 1.37992 | 1.99183 | 0.0 |
| 1.38336 | 1.99179 | 0.0 |
| 1.38681 | 1.99176 | 0.0 |
| 1.39025 | 1.99173 | 0.0 |
| 1.3937 | 1.99169 | 0.0 |
| 1.39714 | 1.99166 | 0.0 |
| 1.40059 | 1.99163 | 0.0 |
| 1.40404 | 1.99159 | 0.0 |
| 1.40748 | 1.99156 | 0.0 |
| 1.41093 | 1.99153 | 0.0 |
| 1.41438 | 1.9915 | 0.0 |
| 1.41783 | 1.99146 | 0.0 |
| 1.42128 | 1.99143 | 0.0 |
| 1.42472 | 1.9914 | 0.0 |
| 1.42817 | 1.99137 | 0.0 |
| 1.43162 | 1.99134 | 0.0 |
| 1.43508 | 1.99131 | 0.0 |
| 1.43853 | 1.99128 | 0.0 |
| 1.44198 | 1.99125 | 0.0 |
| 1.44543 | 1.99122 | 0.0 |
| 1.44888 | 1.99119 | 0.0 |
| 1.45233 | 1.99116 | 0.0 |
| 1.45579 | 1.99113 | 0.0 |
| 1.45924 | 1.9911 | 0.0 |
| 1.4627 | 1.99107 | 0.0 |
| 1.46615 | 1.99104 | 0.0 |
| 1.4696 | 1.99101 | 0.0 |
| 1.47306 | 1.99098 | 0.0 |
| 1.47652 | 1.99095 | 0.0 |
| 1.47997 | 1.99093 | 0.0 |
| 1.48343 | 1.9909 | 0.0 |
| 1.48689 | 1.99087 | 0.0 |
| 1.49034 | 1.99084 | 0.0 |
| 1.4938 | 1.99082 | 0.0 |
| 1.49726 | 1.99079 | 0.0 |
| 1.50072 | 1.99076 | 0.0 |
| 1.50418 | 1.99073 | 0.0 |
| 1.50764 | 1.99071 | 0.0 |
| 1.5111 | 1.99068 | 0.0 |
| 1.51456 | 1.99066 | 0.0 |
| 1.51802 | 1.99063 | 0.0 |
| 1.52148 | 1.9906 | 0.0 |
| 1.52494 | 1.99058 | 0.0 |
| 1.52841 | 1.99055 | 0.0 |
| 1.53187 | 1.99053 | 0.0 |
| 1.53533 | 1.9905 | 0.0 |
| 1.5388 | 1.99048 | 0.0 |
| 1.54226 | 1.99045 | 0.0 |
| 1.54573 | 1.99043 | 0.0 |
| 1.54919 | 1.9904 | 0.0 |
| 1.55266 | 1.99038 | 0.0 |
| 1.55612 | 1.99035 | 0.0 |
| 1.55959 | 1.99033 | 0.0 |
| 1.56306 | 1.99031 | 0.0 |
| 1.56652 | 1.99028 | 0.0 |
| 1.56999 | 1.99026 | 0.0 |
| 1.57346 | 1.99024 | 0.0 |
| 1.57693 | 1.99021 | 0.0 |
| 1.5804 | 1.99019 | 0.0 |
| 1.58387 | 1.99017 | 0.0 |
| 1.58734 | 1.99014 | 0.0 |
| 1.59081 | 1.99012 | 0.0 |
| 1.59428 | 1.9901 | 0.0 |
| 1.59775 | 1.99008 | 0.0 |
| 1.60122 | 1.99005 | 0.0 |
| 1.60469 | 1.99003 | 0.0 |
| 1.60817 | 1.99001 | 0.0 |
| 1.61164 | 1.98999 | 0.0 |
| 1.61511 | 1.98997 | 0.0 |
| 1.61859 | 1.98994 | 0.0 |
| 1.62206 | 1.98992 | 0.0 |
| 1.62554 | 1.9899 | 0.0 |
| 1.62901 | 1.98988 | 0.0 |
| 1.63249 | 1.98986 | 0.0 |
| 1.63596 | 1.98984 | 0.0 |
| 1.63944 | 1.98982 | 0.0 |
| 1.64292 | 1.9898 | 0.0 |
| 1.6464 | 1.98978 | 0.0 |
| 1.64987 | 1.98976 | 0.0 |
| 1.65335 | 1.98974 | 0.0 |
| 1.65683 | 1.98972 | 0.0 |
| 1.66031 | 1.9897 | 0.0 |
| 1.66379 | 1.98968 | 0.0 |
| 1.66727 | 1.98966 | 0.0 |
| 1.67075 | 1.98964 | 0.0 |
| 1.67423 | 1.98962 | 0.0 |
| 1.67771 | 1.9896 | 0.0 |
| 1.6812 | 1.98958 | 0.0 |
| 1.68468 | 1.98956 | 0.0 |
| 1.68816 | 1.98954 | 0.0 |
Optical transmission calculator
Free-standing sample in vacuum, normal incidence- Transmittance T
- —
- Reflectance R
- —
Fresnel reflection calculator
- Rp
- —
- Rs
- —
- R = (Rp+Rs)/2
- —
- Phase φp
- —
- Phase φs
- —
- Brewster angle θB
- —
- Critical angle θC
- —
100 nm thick film deposited by plasma-enchased CVD with certain recipe as an example. Optical properties of SiN films produced by different deposition methods and process parameters can be found in the reference.