Optical constants
Refractive index of AlN (Aluminium nitride)
Beliaev et al. 2021: Non-stoichiometric AlN; n,k 2–20 µm
- Data
- tabulated nk
- Range
- 2.001–20.02 µm
- Points
- 2333
- Licence
- CC0-1.0
Plot
Click the plot to set the calculator wavelength.
At one wavelength
- Refractive index n
- 1.98205
- Extinction coefficient k
- 0.00346466
- Permittivity ε1
- 3.92851
- Permittivity ε2
- 0.0137342
- Absorption coefficient α
- 68.7807 cm⁻¹
- Penetration depth δ = λ/(2πk)
- 290779 nm
- Abbe number Vd
- —
- Chromatic dispersion dn/dλ
- -0.0803109 µm⁻¹
- Group index ng
- 2.49042
- Group velocity dispersion
- — fs²/mm
- Dispersion parameter D
- — ps/(nm·km)
- Photon energy
- 0.195868 eV
ε = (n + ik)², α = 4πk/λ, ng = n − λ dn/dλ, GVD = λ³/(2πc²) d²n/dλ², D = −(λ/c) d²n/dλ². Group-velocity dispersion is given for formula data only.
Use it in Lightsmith
Load this data in Python, simulate in one more line
pip install lightsmith
import lightsmith as ls
# AlN (Aluminium nitride): Beliaev et al. 2021: Non-stoichiometric AlN; n,k 2–20 µm
aln = ls.fetch_refractiveindex("main", "AlN", "Beliaev2", ref="c5c2f188e848453def5970e347399d653df2ffc2")
print(aln.range_nm) # (2001.11, 20018.8) nm
eps = aln.eps([6330]) # complex permittivity
Downloads the original record once (pinned to the imported snapshot) and caches it.
import json, urllib.request
import lightsmith as ls
url = "https://materials.lightsmith.dev/v1/datasets/ds_7c97001bbc1e/lightsmith"
aln = ls.Tabulated.model_validate(json.load(urllib.request.urlopen(url)))
print(aln.source) # citation and provenance travel with the data
Any dataset here, as the library's Tabulated material (aln/beliaev-2021-beliaev2).
# ... load aln as above, then:
sim = ls.Simulation(
particles=[ls.Particle(shape=ls.Sphere(radius_nm=50), material=aln)],
medium_index=1.0,
wavelengths=ls.WavelengthRange(start_nm=2002, stop_nm=20020, num=81),
)
res = ls.solve(sim) # exact Mie for a sphere
print(res.q_ext) # extinction efficiency at each wavelength
Same spec runs with DDA, FDTD, BEM or T-matrix: ls.compare(sim, ["mie", "dda"]).
Lightsmith is open source (MIT): Mie, T-matrix, BEM, DDA, FDTD, RCWA, TMM, mode solvers and inverse design behind one spec, on CPU or GPU. GitHub.
Comments and conditions
References
2) L. Yu. Beliaev, E. Shkondin, A. V. Lavrinenko, O. Takayama. Erratum: Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths [J. Vac. Sci. Technol. A 39, 043408 (2021)]. J. Vac. Sci. Technol. A 40, 027001 (2022) (Numerical data kindly provided by Osamu Takayama)
- doi:10.1116/6.0000884 Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (2021)
- doi:10.1116/6.0001574 Erratum: “Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths” [J. Vac. Sci. Technol. A 39, 043408 (2021)], Journal of Vacuum Science & Technology A (2022)
Cite
Leonid Yu. Beliaev, Evgeniy Shkondin, Andrei V. Lavrinenko and Osamu Takayama. Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 39, 043408 (2021), doi:10.1116/6.0000884; Leonid Yu. Beliaev, Evgeniy Shkondin, Andrei V. Lavrinenko and Osamu Takayama. Erratum: “Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths” [J. Vac. Sci. Technol. A 39, 043408 (2021)]. Journal of Vacuum Science & Technology A, 40, 027001 (2022), doi:10.1116/6.0001574; Data from the refractiveindex.info database (M. N. Polyanskiy, Sci. Data 11, 94 (2024), doi:10.1038/s41597-023-02898-2)
Data
2333 rows as published| λ (µm) | n | k |
|---|---|---|
| 2.00111 | 2.16565 | 7.10112e-05 |
| 2.00188 | 2.16564 | 7.1096e-05 |
| 2.00266 | 2.16562 | 7.11806e-05 |
| 2.00343 | 2.16561 | 7.12656e-05 |
| 2.0042 | 2.1656 | 7.13505e-05 |
| 2.00498 | 2.16559 | 7.14357e-05 |
| 2.00575 | 2.16557 | 7.1521e-05 |
| 2.00653 | 2.16556 | 7.16064e-05 |
| 2.00731 | 2.16555 | 7.1692e-05 |
| 2.00808 | 2.16553 | 7.17779e-05 |
| 2.00886 | 2.16552 | 7.18637e-05 |
| 2.00964 | 2.16551 | 7.19496e-05 |
| 2.01042 | 2.1655 | 7.20356e-05 |
| 2.0112 | 2.16548 | 7.2122e-05 |
| 2.01198 | 2.16547 | 7.22086e-05 |
| 2.01276 | 2.16546 | 7.22951e-05 |
| 2.01354 | 2.16544 | 7.23817e-05 |
| 2.01433 | 2.16543 | 7.24684e-05 |
| 2.01511 | 2.16542 | 7.25555e-05 |
| 2.01589 | 2.16541 | 7.26425e-05 |
| 2.01668 | 2.16539 | 7.27297e-05 |
| 2.01746 | 2.16538 | 7.28172e-05 |
| 2.01825 | 2.16537 | 7.29048e-05 |
| 2.01903 | 2.16535 | 7.29924e-05 |
| 2.01982 | 2.16534 | 7.30802e-05 |
| 2.02061 | 2.16533 | 7.31682e-05 |
| 2.02139 | 2.16532 | 7.32563e-05 |
| 2.02218 | 2.1653 | 7.33445e-05 |
| 2.02297 | 2.16529 | 7.3433e-05 |
| 2.02376 | 2.16528 | 7.35216e-05 |
| 2.02455 | 2.16526 | 7.36103e-05 |
| 2.02534 | 2.16525 | 7.36989e-05 |
| 2.02613 | 2.16524 | 7.3788e-05 |
| 2.02693 | 2.16522 | 7.38769e-05 |
| 2.02772 | 2.16521 | 7.39663e-05 |
| 2.02851 | 2.1652 | 7.40556e-05 |
| 2.02931 | 2.16518 | 7.41452e-05 |
| 2.0301 | 2.16517 | 7.42348e-05 |
| 2.0309 | 2.16516 | 7.43247e-05 |
| 2.03169 | 2.16514 | 7.44147e-05 |
| 2.03249 | 2.16513 | 7.45047e-05 |
| 2.03328 | 2.16512 | 7.45951e-05 |
| 2.03408 | 2.1651 | 7.46856e-05 |
| 2.03488 | 2.16509 | 7.47761e-05 |
| 2.03568 | 2.16508 | 7.48668e-05 |
| 2.03648 | 2.16506 | 7.49576e-05 |
| 2.03728 | 2.16505 | 7.50486e-05 |
| 2.03808 | 2.16504 | 7.51399e-05 |
| 2.03888 | 2.16502 | 7.52311e-05 |
| 2.03968 | 2.16501 | 7.53225e-05 |
| 2.04049 | 2.165 | 7.54142e-05 |
| 2.04129 | 2.16498 | 7.55059e-05 |
| 2.04209 | 2.16497 | 7.55979e-05 |
| 2.0429 | 2.16495 | 7.56898e-05 |
| 2.0437 | 2.16494 | 7.57822e-05 |
| 2.04451 | 2.16493 | 7.58743e-05 |
| 2.04532 | 2.16492 | 7.59669e-05 |
| 2.04612 | 2.1649 | 7.60596e-05 |
| 2.04693 | 2.16489 | 7.61524e-05 |
| 2.04774 | 2.16487 | 7.62453e-05 |
| 2.04855 | 2.16486 | 7.63384e-05 |
| 2.04936 | 2.16485 | 7.64317e-05 |
| 2.05017 | 2.16483 | 7.65251e-05 |
| 2.05098 | 2.16482 | 7.66187e-05 |
| 2.05179 | 2.1648 | 7.67125e-05 |
| 2.0526 | 2.16479 | 7.68062e-05 |
| 2.05342 | 2.16478 | 7.69002e-05 |
| 2.05423 | 2.16477 | 7.69945e-05 |
| 2.05504 | 2.16475 | 7.70887e-05 |
| 2.05586 | 2.16474 | 7.71832e-05 |
| 2.05667 | 2.16472 | 7.7278e-05 |
| 2.05749 | 2.16471 | 7.73727e-05 |
| 2.05831 | 2.1647 | 7.74677e-05 |
| 2.05912 | 2.16468 | 7.75629e-05 |
| 2.05994 | 2.16467 | 7.76581e-05 |
| 2.06076 | 2.16465 | 7.77535e-05 |
| 2.06158 | 2.16464 | 7.78492e-05 |
| 2.0624 | 2.16463 | 7.79451e-05 |
| 2.06322 | 2.16461 | 7.8041e-05 |
| 2.06404 | 2.1646 | 7.81369e-05 |
| 2.06486 | 2.16459 | 7.82332e-05 |
| 2.06569 | 2.16457 | 7.83296e-05 |
| 2.06651 | 2.16456 | 7.84263e-05 |
| 2.06733 | 2.16454 | 7.85229e-05 |
| 2.06816 | 2.16453 | 7.86197e-05 |
| 2.06898 | 2.16451 | 7.87168e-05 |
| 2.06981 | 2.1645 | 7.88138e-05 |
| 2.07064 | 2.16449 | 7.89113e-05 |
| 2.07146 | 2.16447 | 7.90089e-05 |
| 2.07229 | 2.16446 | 7.91064e-05 |
| 2.07312 | 2.16444 | 7.92042e-05 |
| 2.07395 | 2.16443 | 7.93021e-05 |
| 2.07478 | 2.16441 | 7.94005e-05 |
| 2.07561 | 2.1644 | 7.94987e-05 |
| 2.07644 | 2.16439 | 7.95974e-05 |
| 2.07727 | 2.16437 | 7.96958e-05 |
| 2.07811 | 2.16436 | 7.97948e-05 |
| 2.07894 | 2.16435 | 7.98937e-05 |
| 2.07977 | 2.16433 | 7.99929e-05 |
| 2.08061 | 2.16432 | 8.00921e-05 |
| 2.08144 | 2.1643 | 8.01917e-05 |
| 2.08228 | 2.16429 | 8.02913e-05 |
| 2.08312 | 2.16427 | 8.03909e-05 |
| 2.08395 | 2.16426 | 8.04911e-05 |
| 2.08479 | 2.16424 | 8.05912e-05 |
| 2.08563 | 2.16423 | 8.06915e-05 |
| 2.08647 | 2.16422 | 8.07919e-05 |
| 2.08731 | 2.1642 | 8.08927e-05 |
| 2.08815 | 2.16419 | 8.09935e-05 |
| 2.08899 | 2.16417 | 8.10945e-05 |
| 2.08983 | 2.16416 | 8.11955e-05 |
| 2.09068 | 2.16414 | 8.12969e-05 |
| 2.09152 | 2.16413 | 8.13984e-05 |
| 2.09236 | 2.16411 | 8.15001e-05 |
| 2.09321 | 2.1641 | 8.16019e-05 |
| 2.09405 | 2.16408 | 8.17038e-05 |
| 2.0949 | 2.16407 | 8.1806e-05 |
| 2.09575 | 2.16406 | 8.19084e-05 |
| 2.09659 | 2.16404 | 8.2011e-05 |
| 2.09744 | 2.16403 | 8.21136e-05 |
| 2.09829 | 2.16401 | 8.22166e-05 |
| 2.09914 | 2.164 | 8.23195e-05 |
| 2.09999 | 2.16398 | 8.24228e-05 |
| 2.10084 | 2.16397 | 8.25262e-05 |
| 2.10169 | 2.16395 | 8.26296e-05 |
| 2.10254 | 2.16394 | 8.27334e-05 |
| 2.1034 | 2.16392 | 8.28373e-05 |
| 2.10425 | 2.16391 | 8.29414e-05 |
| 2.10511 | 2.16389 | 8.30457e-05 |
| 2.10596 | 2.16388 | 8.315e-05 |
| 2.10682 | 2.16386 | 8.32548e-05 |
| 2.10767 | 2.16385 | 8.33596e-05 |
| 2.10853 | 2.16383 | 8.34643e-05 |
| 2.10939 | 2.16382 | 8.35696e-05 |
| 2.11025 | 2.1638 | 8.36748e-05 |
| 2.11111 | 2.16379 | 8.37804e-05 |
| 2.11197 | 2.16377 | 8.38861e-05 |
| 2.11283 | 2.16376 | 8.39921e-05 |
| 2.11369 | 2.16374 | 8.4098e-05 |
| 2.11455 | 2.16373 | 8.42042e-05 |
| 2.11541 | 2.16371 | 8.43106e-05 |
| 2.11628 | 2.1637 | 8.44173e-05 |
| 2.11714 | 2.16368 | 8.45239e-05 |
| 2.118 | 2.16367 | 8.4631e-05 |
| 2.11887 | 2.16365 | 8.47381e-05 |
| 2.11974 | 2.16364 | 8.48453e-05 |
| 2.1206 | 2.16362 | 8.49529e-05 |
| 2.12147 | 2.16361 | 8.50605e-05 |
| 2.12234 | 2.16359 | 8.51683e-05 |
| 2.12321 | 2.16358 | 8.52763e-05 |
| 2.12408 | 2.16356 | 8.53847e-05 |
| 2.12495 | 2.16355 | 8.54929e-05 |
| 2.12582 | 2.16353 | 8.56017e-05 |
| 2.12669 | 2.16352 | 8.57105e-05 |
| 2.12756 | 2.1635 | 8.58194e-05 |
| 2.12844 | 2.16349 | 8.59285e-05 |
| 2.12931 | 2.16347 | 8.6038e-05 |
| 2.13019 | 2.16346 | 8.61474e-05 |
| 2.13106 | 2.16344 | 8.62571e-05 |
| 2.13194 | 2.16342 | 8.63671e-05 |
| 2.13282 | 2.16341 | 8.64772e-05 |
| 2.13369 | 2.16339 | 8.65874e-05 |
| 2.13457 | 2.16338 | 8.66978e-05 |
| 2.13545 | 2.16336 | 8.68084e-05 |
| 2.13633 | 2.16335 | 8.69193e-05 |
| 2.13721 | 2.16333 | 8.70304e-05 |
| 2.13809 | 2.16331 | 8.71417e-05 |
| 2.13897 | 2.1633 | 8.7253e-05 |
| 2.13986 | 2.16328 | 8.73646e-05 |
| 2.14074 | 2.16327 | 8.74764e-05 |
| 2.14163 | 2.16325 | 8.75885e-05 |
| 2.14251 | 2.16324 | 8.77005e-05 |
| 2.1434 | 2.16322 | 8.7813e-05 |
| 2.14428 | 2.16321 | 8.79255e-05 |
| 2.14517 | 2.16319 | 8.80383e-05 |
| 2.14606 | 2.16317 | 8.81513e-05 |
| 2.14695 | 2.16316 | 8.82644e-05 |
| 2.14784 | 2.16314 | 8.83779e-05 |
| 2.14873 | 2.16313 | 8.84913e-05 |
| 2.14962 | 2.16311 | 8.8605e-05 |
| 2.15051 | 2.1631 | 8.87189e-05 |
| 2.1514 | 2.16308 | 8.88331e-05 |
| 2.15229 | 2.16306 | 8.89474e-05 |
| 2.15319 | 2.16305 | 8.9062e-05 |
| 2.15408 | 2.16303 | 8.91766e-05 |
| 2.15498 | 2.16302 | 8.92917e-05 |
| 2.15587 | 2.163 | 8.94068e-05 |
| 2.15677 | 2.16298 | 8.95222e-05 |
| 2.15767 | 2.16297 | 8.96377e-05 |
| 2.15857 | 2.16295 | 8.97533e-05 |
| 2.15946 | 2.16294 | 8.98693e-05 |
| 2.16036 | 2.16292 | 8.99856e-05 |
| 2.16127 | 2.1629 | 9.01018e-05 |
| 2.16217 | 2.16289 | 9.02183e-05 |
| 2.16307 | 2.16287 | 9.0335e-05 |
| 2.16397 | 2.16285 | 9.0452e-05 |
| 2.16487 | 2.16284 | 9.05692e-05 |
| 2.16578 | 2.16282 | 9.06866e-05 |
| 2.16668 | 2.16281 | 9.0804e-05 |
| 2.16759 | 2.16279 | 9.09217e-05 |
| 2.1685 | 2.16277 | 9.10398e-05 |
| 2.1694 | 2.16276 | 9.11579e-05 |
| 2.17031 | 2.16274 | 9.12763e-05 |
| 2.17122 | 2.16273 | 9.13949e-05 |
| 2.17213 | 2.16271 | 9.15137e-05 |
| 2.17304 | 2.16269 | 9.16325e-05 |
| 2.17395 | 2.16268 | 9.17518e-05 |
| 2.17486 | 2.16266 | 9.18713e-05 |
| 2.17578 | 2.16264 | 9.19909e-05 |
| 2.17669 | 2.16263 | 9.21106e-05 |
| 2.1776 | 2.16261 | 9.22306e-05 |
| 2.17852 | 2.16259 | 9.23509e-05 |
| 2.17943 | 2.16258 | 9.24714e-05 |
| 2.18035 | 2.16256 | 9.25921e-05 |
| 2.18127 | 2.16254 | 9.2713e-05 |
| 2.18219 | 2.16253 | 9.28341e-05 |
| 2.18311 | 2.16251 | 9.29553e-05 |
| 2.18402 | 2.16249 | 9.3077e-05 |
| 2.18495 | 2.16248 | 9.31986e-05 |
| 2.18587 | 2.16246 | 9.33205e-05 |
| 2.18679 | 2.16245 | 9.34428e-05 |
| 2.18771 | 2.16243 | 9.35651e-05 |
| 2.18863 | 2.16241 | 9.36878e-05 |
| 2.18956 | 2.16239 | 9.38106e-05 |
| 2.19048 | 2.16238 | 9.39336e-05 |
| 2.19141 | 2.16236 | 9.40569e-05 |
| 2.19234 | 2.16234 | 9.41802e-05 |
| 2.19326 | 2.16233 | 9.43039e-05 |
| 2.19419 | 2.16231 | 9.44279e-05 |
| 2.19512 | 2.16229 | 9.4552e-05 |
| 2.19605 | 2.16228 | 9.46764e-05 |
| 2.19698 | 2.16226 | 9.48008e-05 |
| 2.19791 | 2.16224 | 9.49258e-05 |
| 2.19884 | 2.16223 | 9.50507e-05 |
| 2.19978 | 2.16221 | 9.51758e-05 |
| 2.20071 | 2.16219 | 9.53012e-05 |
| 2.20165 | 2.16217 | 9.54271e-05 |
| 2.20258 | 2.16216 | 9.55529e-05 |
| 2.20352 | 2.16214 | 9.5679e-05 |
| 2.20445 | 2.16212 | 9.58053e-05 |
| 2.20539 | 2.16211 | 9.59319e-05 |
| 2.20633 | 2.16209 | 9.60587e-05 |
| 2.20727 | 2.16207 | 9.61857e-05 |
| 2.20821 | 2.16205 | 9.6313e-05 |
| 2.20915 | 2.16204 | 9.64402e-05 |
| 2.21009 | 2.16202 | 9.6568e-05 |
| 2.21103 | 2.162 | 9.66959e-05 |
| 2.21198 | 2.16199 | 9.68242e-05 |
| 2.21292 | 2.16197 | 9.69524e-05 |
| 2.21387 | 2.16195 | 9.70811e-05 |
| 2.21481 | 2.16193 | 9.72099e-05 |
| 2.21576 | 2.16192 | 9.73389e-05 |
| 2.21671 | 2.1619 | 9.74682e-05 |
| 2.21765 | 2.16188 | 9.75979e-05 |
| 2.2186 | 2.16186 | 9.77274e-05 |
| 2.21955 | 2.16185 | 9.78576e-05 |
| 2.2205 | 2.16183 | 9.79876e-05 |
| 2.22145 | 2.16181 | 9.81182e-05 |
| 2.22241 | 2.1618 | 9.82489e-05 |
| 2.22336 | 2.16178 | 9.83797e-05 |
| 2.22431 | 2.16176 | 9.8511e-05 |
| 2.22527 | 2.16174 | 9.86422e-05 |
| 2.22622 | 2.16172 | 9.87739e-05 |
| 2.22718 | 2.16171 | 9.89059e-05 |
| 2.22814 | 2.16169 | 9.90378e-05 |
| 2.2291 | 2.16167 | 9.91703e-05 |
| 2.23005 | 2.16165 | 9.93027e-05 |
| 2.23101 | 2.16164 | 9.94356e-05 |
| 2.23197 | 2.16162 | 9.95687e-05 |
| 2.23293 | 2.1616 | 9.97019e-05 |
| 2.2339 | 2.16158 | 9.98354e-05 |
| 2.23486 | 2.16156 | 9.99693e-05 |
| 2.23582 | 2.16155 | 0.000100103 |
| 2.23679 | 2.16153 | 0.000100237 |
| 2.23775 | 2.16151 | 0.000100372 |
| 2.23872 | 2.16149 | 0.000100507 |
| 2.23969 | 2.16147 | 0.000100642 |
| 2.24065 | 2.16146 | 0.000100777 |
| 2.24162 | 2.16144 | 0.000100912 |
| 2.24259 | 2.16142 | 0.000101048 |
| 2.24356 | 2.1614 | 0.000101184 |
| 2.24453 | 2.16138 | 0.00010132 |
| 2.24551 | 2.16137 | 0.000101457 |
| 2.24648 | 2.16135 | 0.000101593 |
| 2.24745 | 2.16133 | 0.00010173 |
| 2.24843 | 2.16131 | 0.000101868 |
| 2.2494 | 2.16129 | 0.000102005 |
| 2.25038 | 2.16128 | 0.000102143 |
| 2.25136 | 2.16126 | 0.000102281 |
| 2.25233 | 2.16124 | 0.000102419 |
| 2.25331 | 2.16122 | 0.000102557 |
| 2.25429 | 2.1612 | 0.000102696 |
| 2.25527 | 2.16118 | 0.000102835 |
| 2.25626 | 2.16117 | 0.000102974 |
| 2.25724 | 2.16115 | 0.000103113 |
| 2.25822 | 2.16113 | 0.000103253 |
| 2.2592 | 2.16111 | 0.000103393 |
| 2.26019 | 2.16109 | 0.000103534 |
| 2.26118 | 2.16107 | 0.000103674 |
| 2.26216 | 2.16106 | 0.000103815 |
| 2.26315 | 2.16104 | 0.000103956 |
| 2.26414 | 2.16102 | 0.000104097 |
| 2.26513 | 2.161 | 0.000104238 |
| 2.26612 | 2.16098 | 0.00010438 |
| 2.26711 | 2.16096 | 0.000104522 |
| 2.2681 | 2.16094 | 0.000104665 |
| 2.26909 | 2.16092 | 0.000104807 |
| 2.27009 | 2.1609 | 0.00010495 |
| 2.27108 | 2.16089 | 0.000105093 |
| 2.27207 | 2.16087 | 0.000105236 |
| 2.27307 | 2.16085 | 0.00010538 |
| 2.27407 | 2.16083 | 0.000105524 |
| 2.27507 | 2.16081 | 0.000105668 |
| 2.27606 | 2.16079 | 0.000105812 |
| 2.27706 | 2.16077 | 0.000105957 |
| 2.27806 | 2.16075 | 0.000106102 |
| 2.27907 | 2.16074 | 0.000106247 |
| 2.28007 | 2.16072 | 0.000106392 |
| 2.28107 | 2.1607 | 0.000106538 |
| 2.28208 | 2.16068 | 0.000106684 |
| 2.28308 | 2.16066 | 0.00010683 |
| 2.28409 | 2.16064 | 0.000106977 |
| 2.28509 | 2.16062 | 0.000107124 |
| 2.2861 | 2.1606 | 0.000107271 |
| 2.28711 | 2.16058 | 0.000107418 |
| 2.28812 | 2.16056 | 0.000107566 |
| 2.28913 | 2.16054 | 0.000107714 |
| 2.29014 | 2.16053 | 0.000107862 |
| 2.29115 | 2.16051 | 0.00010801 |
| 2.29216 | 2.16049 | 0.000108159 |
| 2.29318 | 2.16047 | 0.000108308 |
| 2.29419 | 2.16045 | 0.000108457 |
| 2.29521 | 2.16043 | 0.000108607 |
| 2.29622 | 2.16041 | 0.000108756 |
| 2.29724 | 2.16039 | 0.000108907 |
| 2.29826 | 2.16037 | 0.000109057 |
| 2.29928 | 2.16035 | 0.000109208 |
| 2.3003 | 2.16033 | 0.000109359 |
| 2.30132 | 2.16031 | 0.00010951 |
| 2.30234 | 2.16029 | 0.000109661 |
| 2.30337 | 2.16027 | 0.000109813 |
| 2.30439 | 2.16025 | 0.000109965 |
| 2.30541 | 2.16023 | 0.000110117 |
| 2.30644 | 2.16021 | 0.00011027 |
| 2.30747 | 2.16019 | 0.000110423 |
| 2.30849 | 2.16017 | 0.000110576 |
| 2.30952 | 2.16016 | 0.00011073 |
| 2.31055 | 2.16013 | 0.000110883 |
| 2.31158 | 2.16012 | 0.000111038 |
| 2.31261 | 2.16009 | 0.000111192 |
| 2.31364 | 2.16007 | 0.000111347 |
| 2.31468 | 2.16006 | 0.000111501 |
| 2.31571 | 2.16003 | 0.000111657 |
| 2.31674 | 2.16002 | 0.000111812 |
| 2.31778 | 2.16 | 0.000111968 |
| 2.31882 | 2.15997 | 0.000112124 |
| 2.31985 | 2.15996 | 0.00011228 |
| 2.32089 | 2.15994 | 0.000112437 |
| 2.32193 | 2.15991 | 0.000112594 |
| 2.32297 | 2.1599 | 0.000112751 |
| 2.32401 | 2.15987 | 0.000112909 |
| 2.32506 | 2.15985 | 0.000113067 |
| 2.3261 | 2.15983 | 0.000113225 |
| 2.32714 | 2.15981 | 0.000113383 |
| 2.32819 | 2.15979 | 0.000113542 |
| 2.32923 | 2.15977 | 0.000113701 |
| 2.33028 | 2.15975 | 0.000113861 |
| 2.33133 | 2.15973 | 0.00011402 |
| 2.33238 | 2.15971 | 0.00011418 |
| 2.33343 | 2.15969 | 0.00011434 |
| 2.33448 | 2.15967 | 0.000114501 |
| 2.33553 | 2.15965 | 0.000114662 |
| 2.33658 | 2.15963 | 0.000114823 |
| 2.33764 | 2.15961 | 0.000114984 |
| 2.33869 | 2.15959 | 0.000115146 |
| 2.33975 | 2.15957 | 0.000115308 |
| 2.3408 | 2.15955 | 0.000115471 |
| 2.34186 | 2.15953 | 0.000115633 |
| 2.34292 | 2.15951 | 0.000115796 |
| 2.34398 | 2.15949 | 0.00011596 |
| 2.34504 | 2.15947 | 0.000116123 |
| 2.3461 | 2.15944 | 0.000116287 |
| 2.34716 | 2.15942 | 0.000116451 |
| 2.34822 | 2.1594 | 0.000116616 |
| 2.34929 | 2.15938 | 0.000116781 |
| 2.35035 | 2.15936 | 0.000116946 |
| 2.35142 | 2.15934 | 0.000117111 |
| 2.35248 | 2.15932 | 0.000117277 |
| 2.35355 | 2.1593 | 0.000117443 |
| 2.35462 | 2.15928 | 0.00011761 |
| 2.35569 | 2.15926 | 0.000117777 |
| 2.35676 | 2.15924 | 0.000117944 |
| 2.35783 | 2.15922 | 0.000118111 |
| 2.35891 | 2.15919 | 0.000118279 |
| 2.35998 | 2.15917 | 0.000118447 |
| 2.36105 | 2.15915 | 0.000118615 |
| 2.36213 | 2.15913 | 0.000118784 |
| 2.36321 | 2.15911 | 0.000118953 |
| 2.36428 | 2.15909 | 0.000119122 |
| 2.36536 | 2.15907 | 0.000119292 |
| 2.36644 | 2.15904 | 0.000119462 |
| 2.36752 | 2.15902 | 0.000119632 |
| 2.3686 | 2.159 | 0.000119803 |
| 2.36969 | 2.15898 | 0.000119974 |
| 2.37077 | 2.15896 | 0.000120145 |
| 2.37185 | 2.15894 | 0.000120317 |
| 2.37294 | 2.15892 | 0.000120489 |
| 2.37403 | 2.1589 | 0.000120661 |
| 2.37511 | 2.15887 | 0.000120834 |
| 2.3762 | 2.15885 | 0.000121007 |
| 2.37729 | 2.15883 | 0.00012118 |
| 2.37838 | 2.15881 | 0.000121354 |
| 2.37947 | 2.15879 | 0.000121528 |
| 2.38057 | 2.15876 | 0.000121702 |
| 2.38166 | 2.15874 | 0.000121876 |
| 2.38276 | 2.15872 | 0.000122051 |
| 2.38385 | 2.1587 | 0.000122227 |
| 2.38495 | 2.15868 | 0.000122402 |
| 2.38604 | 2.15865 | 0.000122578 |
| 2.38714 | 2.15863 | 0.000122755 |
| 2.38824 | 2.15861 | 0.000122931 |
| 2.38934 | 2.15859 | 0.000123108 |
| 2.39044 | 2.15857 | 0.000123286 |
| 2.39155 | 2.15855 | 0.000123463 |
| 2.39265 | 2.15852 | 0.000123642 |
| 2.39376 | 2.1585 | 0.00012382 |
| 2.39486 | 2.15848 | 0.000123998 |
| 2.39597 | 2.15846 | 0.000124178 |
| 2.39708 | 2.15843 | 0.000124357 |
| 2.39818 | 2.15841 | 0.000124537 |
| 2.39929 | 2.15839 | 0.000124717 |
| 2.40041 | 2.15837 | 0.000124897 |
| 2.40152 | 2.15835 | 0.000125078 |
| 2.40263 | 2.15832 | 0.000125259 |
| 2.40374 | 2.1583 | 0.000125441 |
| 2.40486 | 2.15828 | 0.000125623 |
| 2.40597 | 2.15826 | 0.000125805 |
| 2.40709 | 2.15823 | 0.000125988 |
| 2.40821 | 2.15821 | 0.000126171 |
| 2.40933 | 2.15819 | 0.000126354 |
| 2.41045 | 2.15817 | 0.000126538 |
| 2.41157 | 2.15814 | 0.000126722 |
| 2.41269 | 2.15812 | 0.000126906 |
| 2.41382 | 2.1581 | 0.000127091 |
| 2.41494 | 2.15808 | 0.000127276 |
| 2.41606 | 2.15805 | 0.000127461 |
| 2.41719 | 2.15803 | 0.000127647 |
| 2.41832 | 2.15801 | 0.000127834 |
| 2.41945 | 2.15798 | 0.00012802 |
| 2.42058 | 2.15796 | 0.000128207 |
| 2.42171 | 2.15794 | 0.000128394 |
| 2.42284 | 2.15792 | 0.000128582 |
| 2.42397 | 2.15789 | 0.00012877 |
| 2.42511 | 2.15787 | 0.000128958 |
| 2.42624 | 2.15785 | 0.000129147 |
| 2.42738 | 2.15782 | 0.000129336 |
| 2.42851 | 2.1578 | 0.000129526 |
| 2.42965 | 2.15778 | 0.000129716 |
| 2.43079 | 2.15775 | 0.000129906 |
| 2.43193 | 2.15773 | 0.000130097 |
| 2.43307 | 2.15771 | 0.000130288 |
| 2.43421 | 2.15768 | 0.000130479 |
| 2.43536 | 2.15766 | 0.000130671 |
| 2.4365 | 2.15764 | 0.000130863 |
| 2.43765 | 2.15761 | 0.000131056 |
| 2.43879 | 2.15759 | 0.000131249 |
| 2.43994 | 2.15757 | 0.000131442 |
| 2.44109 | 2.15754 | 0.000131636 |
| 2.44224 | 2.15752 | 0.00013183 |
| 2.44339 | 2.1575 | 0.000132024 |
| 2.44454 | 2.15747 | 0.000132219 |
| 2.4457 | 2.15745 | 0.000132414 |
| 2.44685 | 2.15742 | 0.00013261 |
| 2.44801 | 2.1574 | 0.000132806 |
| 2.44916 | 2.15738 | 0.000133002 |
| 2.45032 | 2.15735 | 0.000133199 |
| 2.45148 | 2.15733 | 0.000133397 |
| 2.45264 | 2.15731 | 0.000133594 |
| 2.4538 | 2.15728 | 0.000133792 |
| 2.45496 | 2.15726 | 0.00013399 |
| 2.45612 | 2.15723 | 0.000134189 |
| 2.45729 | 2.15721 | 0.000134388 |
| 2.45845 | 2.15719 | 0.000134588 |
| 2.45962 | 2.15716 | 0.000134788 |
| 2.46079 | 2.15714 | 0.000134988 |
| 2.46195 | 2.15711 | 0.000135189 |
| 2.46312 | 2.15709 | 0.00013539 |
| 2.46429 | 2.15707 | 0.000135592 |
| 2.46547 | 2.15704 | 0.000135794 |
| 2.46664 | 2.15702 | 0.000135996 |
| 2.46781 | 2.15699 | 0.000136199 |
| 2.46899 | 2.15697 | 0.000136402 |
| 2.47016 | 2.15694 | 0.000136606 |
| 2.47134 | 2.15692 | 0.00013681 |
| 2.47252 | 2.1569 | 0.000137014 |
| 2.4737 | 2.15687 | 0.000137219 |
| 2.47488 | 2.15685 | 0.000137424 |
| 2.47606 | 2.15682 | 0.00013763 |
| 2.47725 | 2.1568 | 0.000137836 |
| 2.47843 | 2.15677 | 0.000138043 |
| 2.47962 | 2.15675 | 0.00013825 |
| 2.4808 | 2.15672 | 0.000138457 |
| 2.48199 | 2.1567 | 0.000138665 |
| 2.48318 | 2.15667 | 0.000138873 |
| 2.48437 | 2.15665 | 0.000139082 |
| 2.48556 | 2.15662 | 0.000139291 |
| 2.48675 | 2.1566 | 0.0001395 |
| 2.48794 | 2.15657 | 0.00013971 |
| 2.48914 | 2.15655 | 0.00013992 |
| 2.49033 | 2.15652 | 0.000140131 |
| 2.49153 | 2.1565 | 0.000140342 |
| 2.49273 | 2.15647 | 0.000140554 |
| 2.49393 | 2.15645 | 0.000140766 |
| 2.49513 | 2.15642 | 0.000140978 |
| 2.49633 | 2.1564 | 0.000141191 |
| 2.49753 | 2.15637 | 0.000141404 |
| 2.49873 | 2.15635 | 0.000141618 |
| 2.49994 | 2.15632 | 0.000141832 |
| 2.50115 | 2.1563 | 0.000142047 |
| 2.50235 | 2.15627 | 0.000142262 |
| 2.50356 | 2.15625 | 0.000142477 |
| 2.50477 | 2.15622 | 0.000142693 |
| 2.50598 | 2.1562 | 0.00014291 |
| 2.50719 | 2.15617 | 0.000143126 |
| 2.50841 | 2.15614 | 0.000143344 |
| 2.50962 | 2.15612 | 0.000143561 |
| 2.51084 | 2.15609 | 0.00014378 |
| 2.51205 | 2.15607 | 0.000143998 |
| 2.51327 | 2.15604 | 0.000144217 |
| 2.51449 | 2.15601 | 0.000144437 |
| 2.51571 | 2.15599 | 0.000144657 |
| 2.51693 | 2.15596 | 0.000144877 |
| 2.51815 | 2.15594 | 0.000145098 |
| 2.51938 | 2.15591 | 0.000145319 |
| 2.5206 | 2.15589 | 0.000145541 |
| 2.52183 | 2.15586 | 0.000145763 |
| 2.52305 | 2.15583 | 0.000145986 |
| 2.52428 | 2.15581 | 0.000146209 |
| 2.52551 | 2.15578 | 0.000146433 |
| 2.52674 | 2.15576 | 0.000146657 |
| 2.52797 | 2.15573 | 0.000146881 |
| 2.52921 | 2.1557 | 0.000147106 |
| 2.53044 | 2.15568 | 0.000147332 |
| 2.53168 | 2.15565 | 0.000147558 |
| 2.53291 | 2.15563 | 0.000147784 |
| 2.53415 | 2.1556 | 0.000148011 |
| 2.53539 | 2.15557 | 0.000148238 |
| 2.53663 | 2.15554 | 0.000148466 |
| 2.53787 | 2.15552 | 0.000148694 |
| 2.53912 | 2.15549 | 0.000148923 |
| 2.54036 | 2.15547 | 0.000149152 |
| 2.54161 | 2.15544 | 0.000149382 |
| 2.54285 | 2.15541 | 0.000149612 |
| 2.5441 | 2.15538 | 0.000149843 |
| 2.54535 | 2.15536 | 0.000150074 |
| 2.5466 | 2.15533 | 0.000150305 |
| 2.54785 | 2.15531 | 0.000150537 |
| 2.5491 | 2.15528 | 0.00015077 |
| 2.55036 | 2.15525 | 0.000151003 |
| 2.55161 | 2.15522 | 0.000151236 |
| 2.55287 | 2.1552 | 0.000151471 |
| 2.55413 | 2.15517 | 0.000151705 |
| 2.55538 | 2.15514 | 0.00015194 |
| 2.55664 | 2.15511 | 0.000152176 |
| 2.55791 | 2.15509 | 0.000152412 |
| 2.55917 | 2.15506 | 0.000152648 |
| 2.56043 | 2.15503 | 0.000152885 |
| 2.5617 | 2.15501 | 0.000153123 |
| 2.56296 | 2.15498 | 0.000153361 |
| 2.56423 | 2.15495 | 0.000153599 |
| 2.5655 | 2.15492 | 0.000153838 |
| 2.56677 | 2.1549 | 0.000154077 |
| 2.56804 | 2.15487 | 0.000154317 |
| 2.56931 | 2.15484 | 0.000154558 |
| 2.57059 | 2.15481 | 0.000154799 |
| 2.57186 | 2.15479 | 0.00015504 |
| 2.57314 | 2.15476 | 0.000155282 |
| 2.57442 | 2.15473 | 0.000155525 |
| 2.5757 | 2.1547 | 0.000155768 |
| 2.57698 | 2.15467 | 0.000156011 |
| 2.57826 | 2.15465 | 0.000156255 |
| 2.57954 | 2.15462 | 0.0001565 |
| 2.58082 | 2.15459 | 0.000156745 |
| 2.58211 | 2.15456 | 0.000156991 |
| 2.5834 | 2.15453 | 0.000157236 |
| 2.58468 | 2.15451 | 0.000157483 |
| 2.58597 | 2.15448 | 0.00015773 |
| 2.58726 | 2.15445 | 0.000157978 |
| 2.58855 | 2.15442 | 0.000158226 |
| 2.58985 | 2.15439 | 0.000158475 |
| 2.59114 | 2.15437 | 0.000158724 |
| 2.59244 | 2.15434 | 0.000158974 |
| 2.59373 | 2.15431 | 0.000159224 |
| 2.59503 | 2.15428 | 0.000159475 |
| 2.59633 | 2.15425 | 0.000159726 |
| 2.59763 | 2.15422 | 0.000159978 |
| 2.59893 | 2.15419 | 0.000160231 |
| 2.60024 | 2.15417 | 0.000160484 |
| 2.60154 | 2.15414 | 0.000160737 |
| 2.60285 | 2.15411 | 0.000160991 |
| 2.60416 | 2.15408 | 0.000161246 |
| 2.60546 | 2.15405 | 0.000161501 |
| 2.60677 | 2.15402 | 0.000161757 |
| 2.60809 | 2.15399 | 0.000162013 |
| 2.6094 | 2.15396 | 0.00016227 |
| 2.61071 | 2.15394 | 0.000162527 |
| 2.61203 | 2.15391 | 0.000162785 |
| 2.61334 | 2.15388 | 0.000163043 |
| 2.61466 | 2.15385 | 0.000163303 |
| 2.61598 | 2.15382 | 0.000163562 |
| 2.6173 | 2.15379 | 0.000163822 |
| 2.61862 | 2.15376 | 0.000164083 |
| 2.61995 | 2.15373 | 0.000164344 |
| 2.62127 | 2.1537 | 0.000164606 |
| 2.6226 | 2.15367 | 0.000164868 |
| 2.62392 | 2.15364 | 0.000165131 |
| 2.62525 | 2.15361 | 0.000165395 |
| 2.62658 | 2.15358 | 0.000165659 |
| 2.62791 | 2.15355 | 0.000165923 |
| 2.62925 | 2.15353 | 0.000166188 |
| 2.63058 | 2.15349 | 0.000166454 |
| 2.63192 | 2.15346 | 0.00016672 |
| 2.63325 | 2.15343 | 0.000166987 |
| 2.63459 | 2.1534 | 0.000167255 |
| 2.63593 | 2.15337 | 0.000167523 |
| 2.63727 | 2.15334 | 0.000167792 |
| 2.63861 | 2.15332 | 0.000168061 |
| 2.63996 | 2.15329 | 0.000168331 |
| 2.6413 | 2.15326 | 0.000168601 |
| 2.64265 | 2.15323 | 0.000168872 |
| 2.644 | 2.1532 | 0.000169144 |
| 2.64534 | 2.15317 | 0.000169416 |
| 2.64669 | 2.15313 | 0.000169688 |
| 2.64805 | 2.1531 | 0.000169962 |
| 2.6494 | 2.15307 | 0.000170236 |
| 2.65075 | 2.15304 | 0.00017051 |
| 2.65211 | 2.15301 | 0.000170785 |
| 2.65347 | 2.15298 | 0.000171061 |
| 2.65483 | 2.15295 | 0.000171337 |
| 2.65619 | 2.15292 | 0.000171614 |
| 2.65755 | 2.15289 | 0.000171892 |
| 2.65891 | 2.15286 | 0.00017217 |
| 2.66027 | 2.15283 | 0.000172449 |
| 2.66164 | 2.1528 | 0.000172728 |
| 2.66301 | 2.15277 | 0.000173008 |
| 2.66438 | 2.15274 | 0.000173289 |
| 2.66575 | 2.15271 | 0.00017357 |
| 2.66712 | 2.15267 | 0.000173852 |
| 2.66849 | 2.15264 | 0.000174134 |
| 2.66986 | 2.15261 | 0.000174417 |
| 2.67124 | 2.15258 | 0.000174701 |
| 2.67262 | 2.15255 | 0.000174985 |
| 2.67399 | 2.15252 | 0.00017527 |
| 2.67537 | 2.15249 | 0.000175556 |
| 2.67676 | 2.15245 | 0.000175842 |
| 2.67814 | 2.15242 | 0.000176128 |
| 2.67952 | 2.15239 | 0.000176416 |
| 2.68091 | 2.15236 | 0.000176704 |
| 2.68229 | 2.15233 | 0.000176993 |
| 2.68368 | 2.1523 | 0.000177282 |
| 2.68507 | 2.15227 | 0.000177572 |
| 2.68646 | 2.15223 | 0.000177863 |
| 2.68786 | 2.1522 | 0.000178154 |
| 2.68925 | 2.15217 | 0.000178446 |
| 2.69065 | 2.15214 | 0.000178738 |
| 2.69204 | 2.15211 | 0.000179031 |
| 2.69344 | 2.15207 | 0.000179325 |
| 2.69484 | 2.15204 | 0.00017962 |
| 2.69624 | 2.15201 | 0.000179915 |
| 2.69765 | 2.15198 | 0.000180211 |
| 2.69905 | 2.15195 | 0.000180507 |
| 2.70046 | 2.15191 | 0.000180804 |
| 2.70186 | 2.15188 | 0.000181102 |
| 2.70327 | 2.15185 | 0.000181401 |
| 2.70468 | 2.15182 | 0.0001817 |
| 2.70609 | 2.15178 | 0.000182 |
| 2.70751 | 2.15175 | 0.0001823 |
| 2.70892 | 2.15172 | 0.000182601 |
| 2.71034 | 2.15169 | 0.000182903 |
| 2.71175 | 2.15165 | 0.000183205 |
| 2.71317 | 2.15162 | 0.000183508 |
| 2.71459 | 2.15159 | 0.000183812 |
| 2.71602 | 2.15156 | 0.000184117 |
| 2.71744 | 2.15152 | 0.000184422 |
| 2.71886 | 2.15149 | 0.000184728 |
| 2.72029 | 2.15146 | 0.000185034 |
| 2.72172 | 2.15142 | 0.000185341 |
| 2.72315 | 2.15139 | 0.000185649 |
| 2.72458 | 2.15136 | 0.000185958 |
| 2.72601 | 2.15132 | 0.000186267 |
| 2.72745 | 2.15129 | 0.000186577 |
| 2.72888 | 2.15126 | 0.000186888 |
| 2.73032 | 2.15122 | 0.000187199 |
| 2.73176 | 2.15119 | 0.000187511 |
| 2.7332 | 2.15116 | 0.000187824 |
| 2.73464 | 2.15112 | 0.000188138 |
| 2.73608 | 2.15109 | 0.000188452 |
| 2.73753 | 2.15106 | 0.000188767 |
| 2.73897 | 2.15102 | 0.000189082 |
| 2.74042 | 2.15099 | 0.000189399 |
| 2.74187 | 2.15095 | 0.000189716 |
| 2.74332 | 2.15092 | 0.000190034 |
| 2.74477 | 2.15089 | 0.000190352 |
| 2.74623 | 2.15085 | 0.000190671 |
| 2.74768 | 2.15082 | 0.000190991 |
| 2.74914 | 2.15078 | 0.000191312 |
| 2.7506 | 2.15075 | 0.000191633 |
| 2.75206 | 2.15072 | 0.000191955 |
| 2.75352 | 2.15068 | 0.000192278 |
| 2.75498 | 2.15065 | 0.000192602 |
| 2.75645 | 2.15061 | 0.000192926 |
| 2.75791 | 2.15058 | 0.000193251 |
| 2.75938 | 2.15054 | 0.000193577 |
| 2.76085 | 2.15051 | 0.000193903 |
| 2.76232 | 2.15047 | 0.000194231 |
| 2.76379 | 2.15044 | 0.000194559 |
| 2.76527 | 2.1504 | 0.000194888 |
| 2.76674 | 2.15037 | 0.000195217 |
| 2.76822 | 2.15033 | 0.000195547 |
| 2.7697 | 2.1503 | 0.000195878 |
| 2.77118 | 2.15027 | 0.00019621 |
| 2.77266 | 2.15023 | 0.000196543 |
| 2.77414 | 2.1502 | 0.000196876 |
| 2.77563 | 2.15016 | 0.00019721 |
| 2.77712 | 2.15012 | 0.000197545 |
| 2.7786 | 2.15009 | 0.00019788 |
| 2.78009 | 2.15005 | 0.000198217 |
| 2.78159 | 2.15002 | 0.000198554 |
| 2.78308 | 2.14998 | 0.000198892 |
| 2.78457 | 2.14995 | 0.000199231 |
| 2.78607 | 2.14991 | 0.00019957 |
| 2.78757 | 2.14987 | 0.000199911 |
| 2.78907 | 2.14984 | 0.000200251 |
| 2.79057 | 2.1498 | 0.000200593 |
| 2.79207 | 2.14977 | 0.000200936 |
| 2.79357 | 2.14973 | 0.000201279 |
| 2.79508 | 2.1497 | 0.000201624 |
| 2.79659 | 2.14966 | 0.000201968 |
| 2.7981 | 2.14962 | 0.000202314 |
| 2.79961 | 2.14959 | 0.000202661 |
| 2.80112 | 2.14955 | 0.000203008 |
| 2.80264 | 2.14951 | 0.000203357 |
| 2.80415 | 2.14948 | 0.000203706 |
| 2.80567 | 2.14944 | 0.000204056 |
| 2.80719 | 2.1494 | 0.000204406 |
| 2.80871 | 2.14937 | 0.000204757 |
| 2.81023 | 2.14933 | 0.00020511 |
| 2.81175 | 2.1493 | 0.000205463 |
| 2.81328 | 2.14926 | 0.000205817 |
| 2.81481 | 2.14922 | 0.000206171 |
| 2.81634 | 2.14919 | 0.000206527 |
| 2.81787 | 2.14915 | 0.000206884 |
| 2.8194 | 2.14911 | 0.000207241 |
| 2.82093 | 2.14907 | 0.000207599 |
| 2.82247 | 2.14904 | 0.000207958 |
| 2.82401 | 2.149 | 0.000208317 |
| 2.82554 | 2.14896 | 0.000208678 |
| 2.82709 | 2.14893 | 0.000209039 |
| 2.82863 | 2.14889 | 0.000209402 |
| 2.83017 | 2.14885 | 0.000209765 |
| 2.83172 | 2.14881 | 0.000210129 |
| 2.83327 | 2.14878 | 0.000210494 |
| 2.83481 | 2.14874 | 0.000210859 |
| 2.83636 | 2.1487 | 0.000211226 |
| 2.83792 | 2.14866 | 0.000211593 |
| 2.83947 | 2.14863 | 0.000211961 |
| 2.84103 | 2.14859 | 0.00021233 |
| 2.84258 | 2.14855 | 0.000212701 |
| 2.84414 | 2.14851 | 0.000213072 |
| 2.84571 | 2.14847 | 0.000213443 |
| 2.84727 | 2.14843 | 0.000213816 |
| 2.84883 | 2.1484 | 0.000214189 |
| 2.8504 | 2.14836 | 0.000214564 |
| 2.85197 | 2.14832 | 0.000214939 |
| 2.85354 | 2.14828 | 0.000215315 |
| 2.85511 | 2.14824 | 0.000215692 |
| 2.85668 | 2.1482 | 0.00021607 |
| 2.85826 | 2.14817 | 0.000216449 |
| 2.85983 | 2.14813 | 0.000216829 |
| 2.86141 | 2.14809 | 0.000217209 |
| 2.86299 | 2.14805 | 0.000217591 |
| 2.86457 | 2.14801 | 0.000217973 |
| 2.86616 | 2.14797 | 0.000218357 |
| 2.86774 | 2.14793 | 0.000218741 |
| 2.86933 | 2.14789 | 0.000219126 |
| 2.87092 | 2.14785 | 0.000219512 |
| 2.87251 | 2.14782 | 0.000219899 |
| 2.8741 | 2.14778 | 0.000220287 |
| 2.87569 | 2.14774 | 0.000220676 |
| 2.87729 | 2.1477 | 0.000221066 |
| 2.87889 | 2.14766 | 0.000221456 |
| 2.88049 | 2.14762 | 0.000221848 |
| 2.88209 | 2.14758 | 0.000222241 |
| 2.88369 | 2.14754 | 0.000222634 |
| 2.88529 | 2.1475 | 0.000223029 |
| 2.8869 | 2.14746 | 0.000223424 |
| 2.88851 | 2.14742 | 0.000223821 |
| 2.89012 | 2.14738 | 0.000224218 |
| 2.89173 | 2.14734 | 0.000224616 |
| 2.89335 | 2.1473 | 0.000225016 |
| 2.89496 | 2.14726 | 0.000225416 |
| 2.89658 | 2.14722 | 0.000225817 |
| 2.8982 | 2.14718 | 0.000226219 |
| 2.89982 | 2.14714 | 0.000226622 |
| 2.90144 | 2.1471 | 0.000227026 |
| 2.90307 | 2.14706 | 0.000227431 |
| 2.90469 | 2.14701 | 0.000227837 |
| 2.90632 | 2.14697 | 0.000228244 |
| 2.90795 | 2.14693 | 0.000228652 |
| 2.90958 | 2.14689 | 0.000229061 |
| 2.91122 | 2.14685 | 0.000229471 |
| 2.91285 | 2.14681 | 0.000229882 |
| 2.91449 | 2.14677 | 0.000230294 |
| 2.91613 | 2.14673 | 0.000230707 |
| 2.91777 | 2.14669 | 0.000231121 |
| 2.91941 | 2.14665 | 0.000231536 |
| 2.92106 | 2.1466 | 0.000231952 |
| 2.9227 | 2.14656 | 0.000232369 |
| 2.92435 | 2.14652 | 0.000232787 |
| 2.926 | 2.14648 | 0.00023294 |
| 2.92765 | 2.14644 | 0.000232944 |
| 2.92931 | 2.1464 | 0.000232949 |
| 2.93096 | 2.14636 | 0.000235283 |
| 2.93262 | 2.14631 | 0.000235287 |
| 2.93428 | 2.14627 | 0.000235292 |
| 2.93594 | 2.14623 | 0.000235296 |
| 2.93761 | 2.14619 | 0.000235301 |
| 2.93927 | 2.14614 | 0.000237636 |
| 2.94094 | 2.1461 | 0.00023764 |
| 2.94261 | 2.14606 | 0.000237645 |
| 2.94428 | 2.14602 | 0.00023765 |
| 2.94595 | 2.14598 | 0.000237654 |
| 2.94763 | 2.14593 | 0.000237659 |
| 2.9493 | 2.14589 | 0.000239994 |
| 2.95098 | 2.14585 | 0.000239998 |
| 2.95266 | 2.1458 | 0.000240003 |
| 2.95434 | 2.14576 | 0.000240008 |
| 2.95603 | 2.14572 | 0.000240013 |
| 2.95772 | 2.14567 | 0.000242348 |
| 2.9594 | 2.14563 | 0.000242353 |
| 2.96109 | 2.14559 | 0.000242358 |
| 2.96279 | 2.14554 | 0.000242363 |
| 2.96448 | 2.1455 | 0.000242367 |
| 2.96618 | 2.14546 | 0.000244703 |
| 2.96787 | 2.14541 | 0.000244708 |
| 2.96957 | 2.14537 | 0.000244713 |
| 2.97128 | 2.14533 | 0.000244718 |
| 2.97298 | 2.14528 | 0.000244723 |
| 2.97468 | 2.14524 | 0.000244728 |
| 2.97639 | 2.14519 | 0.000247064 |
| 2.9781 | 2.14515 | 0.000247069 |
| 2.97981 | 2.14511 | 0.000247074 |
| 2.98153 | 2.14506 | 0.000247079 |
| 2.98324 | 2.14502 | 0.000247084 |
| 2.98496 | 2.14497 | 0.00024942 |
| 2.98668 | 2.14493 | 0.000249426 |
| 2.9884 | 2.14488 | 0.000249431 |
| 2.99012 | 2.14484 | 0.000249436 |
| 2.99185 | 2.1448 | 0.000249441 |
| 2.99358 | 2.14475 | 0.000251777 |
| 2.99531 | 2.14471 | 0.000251783 |
| 2.99704 | 2.14466 | 0.000251788 |
| 2.99877 | 2.14462 | 0.000251793 |
| 3.00051 | 2.14457 | 0.000251798 |
| 3.00224 | 2.14453 | 0.000254135 |
| 3.00398 | 2.14448 | 0.000254141 |
| 3.00572 | 2.14443 | 0.000254146 |
| 3.00747 | 2.14439 | 0.000254151 |
| 3.00921 | 2.14434 | 0.000254157 |
| 3.01096 | 2.1443 | 0.000256494 |
| 3.01271 | 2.14425 | 0.0002565 |
| 3.01446 | 2.14421 | 0.000256505 |
| 3.01622 | 2.14416 | 0.00025651 |
| 3.01797 | 2.14412 | 0.000256516 |
| 3.01973 | 2.14407 | 0.000258854 |
| 3.02149 | 2.14402 | 0.000258859 |
| 3.02325 | 2.14398 | 0.000258865 |
| 3.02501 | 2.14393 | 0.00025887 |
| 3.02678 | 2.14388 | 0.000258876 |
| 3.02855 | 2.14384 | 0.000261214 |
| 3.03032 | 2.14379 | 0.000261219 |
| 3.03209 | 2.14374 | 0.000261225 |
| 3.03386 | 2.1437 | 0.000261231 |
| 3.03564 | 2.14365 | 0.000261237 |
| 3.03742 | 2.1436 | 0.000263575 |
| 3.0392 | 2.14356 | 0.00026358 |
| 3.04098 | 2.14351 | 0.000263586 |
| 3.04277 | 2.14346 | 0.000263592 |
| 3.04455 | 2.14342 | 0.000265931 |
| 3.04634 | 2.14337 | 0.000265936 |
| 3.04813 | 2.14332 | 0.000265942 |
| 3.04993 | 2.14327 | 0.000265948 |
| 3.05172 | 2.14323 | 0.000265954 |
| 3.05352 | 2.14318 | 0.000268293 |
| 3.05532 | 2.14313 | 0.000268299 |
| 3.05712 | 2.14308 | 0.000268305 |
| 3.05892 | 2.14304 | 0.000268311 |
| 3.06073 | 2.14299 | 0.000268317 |
| 3.06254 | 2.14294 | 0.000270657 |
| 3.06435 | 2.14289 | 0.000270662 |
| 3.06616 | 2.14284 | 0.000270669 |
| 3.06797 | 2.14279 | 0.000270675 |
| 3.06979 | 2.14275 | 0.000273014 |
| 3.07161 | 2.1427 | 0.00027302 |
| 3.07343 | 2.14265 | 0.000273027 |
| 3.07525 | 2.1426 | 0.000273033 |
| 3.07708 | 2.14255 | 0.000273039 |
| 3.0789 | 2.1425 | 0.000275379 |
| 3.08073 | 2.14245 | 0.000275385 |
| 3.08257 | 2.1424 | 0.000275392 |
| 3.0844 | 2.14235 | 0.000275398 |
| 3.08624 | 2.1423 | 0.000275404 |
| 3.08807 | 2.14225 | 0.000277745 |
| 3.08991 | 2.1422 | 0.000277751 |
| 3.09176 | 2.14216 | 0.000277758 |
| 3.0936 | 2.14211 | 0.000277764 |
| 3.09545 | 2.14206 | 0.000280105 |
| 3.0973 | 2.14201 | 0.000280111 |
| 3.09915 | 2.14195 | 0.000280118 |
| 3.101 | 2.14191 | 0.000280124 |
| 3.10286 | 2.14185 | 0.000282466 |
| 3.10472 | 2.14181 | 0.000282472 |
| 3.10658 | 2.14175 | 0.000282479 |
| 3.10844 | 2.1417 | 0.000282485 |
| 3.1103 | 2.14165 | 0.000282492 |
| 3.11217 | 2.1416 | 0.000284833 |
| 3.11404 | 2.14155 | 0.00028484 |
| 3.11591 | 2.1415 | 0.000284847 |
| 3.11778 | 2.14145 | 0.000284854 |
| 3.11966 | 2.1414 | 0.000287195 |
| 3.12154 | 2.14135 | 0.000287202 |
| 3.12342 | 2.1413 | 0.000287209 |
| 3.1253 | 2.14124 | 0.000287216 |
| 3.12719 | 2.14119 | 0.000289558 |
| 3.12907 | 2.14114 | 0.000289565 |
| 3.13096 | 2.14109 | 0.000289572 |
| 3.13285 | 2.14104 | 0.000289579 |
| 3.13475 | 2.14099 | 0.000291922 |
| 3.13665 | 2.14093 | 0.000291929 |
| 3.13854 | 2.14088 | 0.000291936 |
| 3.14045 | 2.14083 | 0.000291943 |
| 3.14235 | 2.14078 | 0.00029195 |
| 3.14425 | 2.14073 | 0.000294293 |
| 3.14616 | 2.14067 | 0.0002943 |
| 3.14807 | 2.14062 | 0.000294307 |
| 3.14998 | 2.14057 | 0.000294314 |
| 3.1519 | 2.14051 | 0.000296658 |
| 3.15382 | 2.14046 | 0.000296665 |
| 3.15574 | 2.14041 | 0.000296672 |
| 3.15766 | 2.14036 | 0.00029668 |
| 3.15958 | 2.1403 | 0.000299023 |
| 3.16151 | 2.14025 | 0.00029903 |
| 3.16344 | 2.1402 | 0.000299038 |
| 3.16537 | 2.14014 | 0.000299046 |
| 3.1673 | 2.14009 | 0.000301389 |
| 3.16924 | 2.14004 | 0.000301397 |
| 3.17118 | 2.13998 | 0.000301404 |
| 3.17312 | 2.13993 | 0.000301412 |
| 3.17506 | 2.13987 | 0.000303756 |
| 3.17701 | 2.13982 | 0.000303764 |
| 3.17895 | 2.13976 | 0.000303772 |
| 3.1809 | 2.13971 | 0.000303779 |
| 3.18286 | 2.13966 | 0.000306124 |
| 3.18481 | 2.1396 | 0.000306132 |
| 3.18677 | 2.13955 | 0.00030614 |
| 3.18873 | 2.13949 | 0.000306148 |
| 3.19069 | 2.13944 | 0.000308492 |
| 3.19266 | 2.13938 | 0.0003085 |
| 3.19462 | 2.13933 | 0.000308508 |
| 3.19659 | 2.13927 | 0.000308516 |
| 3.19857 | 2.13921 | 0.000310862 |
| 3.20054 | 2.13916 | 0.00031087 |
| 3.20252 | 2.1391 | 0.000310878 |
| 3.2045 | 2.13905 | 0.000313223 |
| 3.20648 | 2.13899 | 0.000313232 |
| 3.20846 | 2.13894 | 0.00031324 |
| 3.21045 | 2.13888 | 0.000313248 |
| 3.21244 | 2.13882 | 0.000315594 |
| 3.21443 | 2.13877 | 0.000315602 |
| 3.21642 | 2.13871 | 0.00031561 |
| 3.21842 | 2.13866 | 0.000315619 |
| 3.22042 | 2.1386 | 0.000317965 |
| 3.22242 | 2.13854 | 0.000317974 |
| 3.22442 | 2.13849 | 0.000317982 |
| 3.22643 | 2.13843 | 0.00031799 |
| 3.22844 | 2.13837 | 0.000320337 |
| 3.23045 | 2.13831 | 0.000320346 |
| 3.23247 | 2.13826 | 0.000320354 |
| 3.23448 | 2.1382 | 0.000322701 |
| 3.2365 | 2.13814 | 0.00032271 |
| 3.23852 | 2.13808 | 0.000322719 |
| 3.24055 | 2.13803 | 0.000322727 |
| 3.24257 | 2.13797 | 0.000325075 |
| 3.2446 | 2.13791 | 0.000325084 |
| 3.24663 | 2.13785 | 0.000325093 |
| 3.24867 | 2.13779 | 0.000325102 |
| 3.25071 | 2.13774 | 0.000327449 |
| 3.25274 | 2.13768 | 0.000327458 |
| 3.25479 | 2.13762 | 0.000327467 |
| 3.25683 | 2.13756 | 0.000329815 |
| 3.25888 | 2.1375 | 0.000329824 |
| 3.26093 | 2.13744 | 0.000329833 |
| 3.26298 | 2.13738 | 0.000329842 |
| 3.26503 | 2.13733 | 0.000332191 |
| 3.26709 | 2.13726 | 0.0003322 |
| 3.26915 | 2.13721 | 0.000332209 |
| 3.27121 | 2.13715 | 0.000334558 |
| 3.27328 | 2.13709 | 0.000334568 |
| 3.27535 | 2.13703 | 0.000334577 |
| 3.27742 | 2.13697 | 0.000334586 |
| 3.27949 | 2.13691 | 0.000336936 |
| 3.28157 | 2.13685 | 0.000336945 |
| 3.28364 | 2.13679 | 0.000336954 |
| 3.28573 | 2.13673 | 0.000339304 |
| 3.28781 | 2.13667 | 0.000339314 |
| 3.2899 | 2.1366 | 0.000339323 |
| 3.29198 | 2.13654 | 0.000341673 |
| 3.29408 | 2.13648 | 0.000341683 |
| 3.29617 | 2.13642 | 0.000341693 |
| 3.29827 | 2.13636 | 0.000341702 |
| 3.30037 | 2.1363 | 0.000344053 |
| 3.30247 | 2.13624 | 0.000344063 |
| 3.30457 | 2.13618 | 0.000344073 |
| 3.30668 | 2.13612 | 0.000346423 |
| 3.30879 | 2.13605 | 0.000346433 |
| 3.3109 | 2.13599 | 0.000346443 |
| 3.31302 | 2.13593 | 0.000348794 |
| 3.31514 | 2.13587 | 0.000348804 |
| 3.31726 | 2.1358 | 0.000348815 |
| 3.31938 | 2.13574 | 0.000348825 |
| 3.32151 | 2.13568 | 0.000351176 |
| 3.32364 | 2.13562 | 0.000351187 |
| 3.32577 | 2.13555 | 0.000351197 |
| 3.3279 | 2.13549 | 0.000353549 |
| 3.33004 | 2.13543 | 0.000353559 |
| 3.33218 | 2.13536 | 0.00035357 |
| 3.33432 | 2.1353 | 0.000355922 |
| 3.33647 | 2.13524 | 0.000355932 |
| 3.33862 | 2.13517 | 0.000355943 |
| 3.34077 | 2.13511 | 0.000358295 |
| 3.34292 | 2.13505 | 0.000358306 |
| 3.34508 | 2.13498 | 0.000358317 |
| 3.34724 | 2.13492 | 0.000358327 |
| 3.3494 | 2.13485 | 0.00036068 |
| 3.35157 | 2.13479 | 0.000360691 |
| 3.35374 | 2.13472 | 0.000360702 |
| 3.35591 | 2.13466 | 0.000363055 |
| 3.35808 | 2.1346 | 0.000363066 |
| 3.36026 | 2.13453 | 0.000363078 |
| 3.36244 | 2.13446 | 0.000365431 |
| 3.36462 | 2.1344 | 0.000365442 |
| 3.3668 | 2.13434 | 0.000365453 |
| 3.36899 | 2.13427 | 0.000367807 |
| 3.37118 | 2.1342 | 0.000367818 |
| 3.37337 | 2.13414 | 0.00036783 |
| 3.37557 | 2.13407 | 0.000370184 |
| 3.37777 | 2.13401 | 0.000370196 |
| 3.37997 | 2.13394 | 0.000370207 |
| 3.38218 | 2.13387 | 0.000372562 |
| 3.38438 | 2.13381 | 0.000372574 |
| 3.38659 | 2.13374 | 0.000372585 |
| 3.38881 | 2.13367 | 0.00037494 |
| 3.39102 | 2.13361 | 0.000374952 |
| 3.39324 | 2.13354 | 0.000374964 |
| 3.39546 | 2.13347 | 0.000377319 |
| 3.39769 | 2.13341 | 0.000377331 |
| 3.39992 | 2.13334 | 0.000377343 |
| 3.40215 | 2.13327 | 0.000379699 |
| 3.40438 | 2.1332 | 0.000379711 |
| 3.40662 | 2.13313 | 0.000379723 |
| 3.40886 | 2.13307 | 0.000382079 |
| 3.4111 | 2.133 | 0.000382091 |
| 3.41335 | 2.13293 | 0.000382104 |
| 3.4156 | 2.13286 | 0.00038446 |
| 3.41785 | 2.13279 | 0.000384473 |
| 3.4201 | 2.13272 | 0.000384485 |
| 3.42236 | 2.13266 | 0.000386842 |
| 3.42462 | 2.13259 | 0.000386854 |
| 3.42688 | 2.13252 | 0.000389211 |
| 3.42915 | 2.13245 | 0.000389224 |
| 3.43142 | 2.13238 | 0.000389237 |
| 3.43369 | 2.13231 | 0.000391594 |
| 3.43597 | 2.13224 | 0.000391607 |
| 3.43825 | 2.13217 | 0.00039162 |
| 3.44053 | 2.1321 | 0.000393978 |
| 3.44281 | 2.13203 | 0.000393991 |
| 3.4451 | 2.13196 | 0.000394004 |
| 3.44739 | 2.13189 | 0.000396363 |
| 3.44968 | 2.13182 | 0.000396376 |
| 3.45198 | 2.13174 | 0.000396389 |
| 3.45428 | 2.13167 | 0.000398748 |
| 3.45658 | 2.1316 | 0.000398761 |
| 3.45889 | 2.13153 | 0.00040112 |
| 3.4612 | 2.13146 | 0.000401134 |
| 3.46351 | 2.13139 | 0.000401147 |
| 3.46583 | 2.13132 | 0.000403506 |
| 3.46814 | 2.13124 | 0.00040352 |
| 3.47047 | 2.13117 | 0.000403534 |
| 3.47279 | 2.1311 | 0.000405894 |
| 3.47512 | 2.13103 | 0.000405908 |
| 3.47745 | 2.13095 | 0.000405922 |
| 3.47978 | 2.13088 | 0.000408282 |
| 3.48212 | 2.13081 | 0.000408296 |
| 3.48446 | 2.13073 | 0.000410656 |
| 3.4868 | 2.13066 | 0.000410671 |
| 3.48915 | 2.13059 | 0.000410685 |
| 3.4915 | 2.13051 | 0.000413046 |
| 3.49385 | 2.13044 | 0.00041306 |
| 3.49621 | 2.13037 | 0.000415422 |
| 3.49857 | 2.13029 | 0.000415436 |
| 3.50093 | 2.13022 | 0.00041545 |
| 3.50329 | 2.13014 | 0.000417812 |
| 3.50566 | 2.13007 | 0.000417827 |
| 3.50803 | 2.13 | 0.000417841 |
| 3.51041 | 2.12992 | 0.000420204 |
| 3.51279 | 2.12985 | 0.000420218 |
| 3.51517 | 2.12977 | 0.000422581 |
| 3.51755 | 2.12969 | 0.000422596 |
| 3.51994 | 2.12962 | 0.000422611 |
| 3.52233 | 2.12954 | 0.000424974 |
| 3.52473 | 2.12947 | 0.000424989 |
| 3.52713 | 2.12939 | 0.000427352 |
| 3.52953 | 2.12931 | 0.000427368 |
| 3.53193 | 2.12924 | 0.000427383 |
| 3.53434 | 2.12916 | 0.000429747 |
| 3.53675 | 2.12908 | 0.000429762 |
| 3.53916 | 2.12901 | 0.000432126 |
| 3.54158 | 2.12893 | 0.000432142 |
| 3.544 | 2.12885 | 0.000432157 |
| 3.54643 | 2.12878 | 0.000434522 |
| 3.54885 | 2.1287 | 0.000434538 |
| 3.55128 | 2.12862 | 0.000436903 |
| 3.55372 | 2.12854 | 0.000436919 |
| 3.55616 | 2.12846 | 0.000436935 |
| 3.5586 | 2.12839 | 0.0004393 |
| 3.56104 | 2.12831 | 0.000439316 |
| 3.56349 | 2.12823 | 0.000441682 |
| 3.56594 | 2.12815 | 0.000441698 |
| 3.56839 | 2.12807 | 0.000444064 |
| 3.57085 | 2.12799 | 0.000444081 |
| 3.57331 | 2.12791 | 0.000444097 |
| 3.57578 | 2.12783 | 0.000446464 |
| 3.57824 | 2.12775 | 0.000446481 |
| 3.58071 | 2.12767 | 0.000448847 |
| 3.58319 | 2.12759 | 0.000448864 |
| 3.58567 | 2.12751 | 0.000451231 |
| 3.58815 | 2.12743 | 0.000451248 |
| 3.59063 | 2.12735 | 0.000451266 |
| 3.59312 | 2.12727 | 0.000453633 |
| 3.59561 | 2.12719 | 0.00045365 |
| 3.59811 | 2.12711 | 0.000456018 |
| 3.60061 | 2.12703 | 0.000456036 |
| 3.60311 | 2.12694 | 0.000458404 |
| 3.60562 | 2.12686 | 0.000458421 |
| 3.60812 | 2.12678 | 0.000458439 |
| 3.61064 | 2.1267 | 0.000460808 |
| 3.61315 | 2.12662 | 0.000460826 |
| 3.61567 | 2.12653 | 0.000463195 |
| 3.6182 | 2.12645 | 0.000463213 |
| 3.62072 | 2.12637 | 0.000465583 |
| 3.62325 | 2.12629 | 0.000465601 |
| 3.62579 | 2.1262 | 0.000467971 |
| 3.62832 | 2.12612 | 0.000467989 |
| 3.63086 | 2.12603 | 0.000468008 |
| 3.63341 | 2.12595 | 0.000470378 |
| 3.63596 | 2.12587 | 0.000470396 |
| 3.63851 | 2.12578 | 0.000472767 |
| 3.64106 | 2.1257 | 0.000472786 |
| 3.64362 | 2.12561 | 0.000475157 |
| 3.64618 | 2.12553 | 0.000475176 |
| 3.64875 | 2.12544 | 0.000477547 |
| 3.65132 | 2.12536 | 0.000477566 |
| 3.65389 | 2.12527 | 0.000479939 |
| 3.65647 | 2.12519 | 0.000479958 |
| 3.65905 | 2.1251 | 0.00048233 |
| 3.66163 | 2.12502 | 0.000482349 |
| 3.66422 | 2.12493 | 0.000482369 |
| 3.66681 | 2.12484 | 0.000484742 |
| 3.66941 | 2.12475 | 0.000484762 |
| 3.67201 | 2.12467 | 0.000487135 |
| 3.67461 | 2.12458 | 0.000487155 |
| 3.67722 | 2.12449 | 0.000489529 |
| 3.67983 | 2.12441 | 0.000489549 |
| 3.68244 | 2.12432 | 0.000491922 |
| 3.68506 | 2.12423 | 0.000491943 |
| 3.68768 | 2.12414 | 0.000494317 |
| 3.6903 | 2.12406 | 0.000494337 |
| 3.69293 | 2.12397 | 0.000496712 |
| 3.69556 | 2.12388 | 0.000496733 |
| 3.6982 | 2.12379 | 0.000499108 |
| 3.70084 | 2.1237 | 0.000499129 |
| 3.70348 | 2.12361 | 0.000501504 |
| 3.70613 | 2.12352 | 0.000501526 |
| 3.70878 | 2.12343 | 0.000503901 |
| 3.71144 | 2.12334 | 0.000503923 |
| 3.71409 | 2.12325 | 0.000506299 |
| 3.71676 | 2.12316 | 0.000506321 |
| 3.71942 | 2.12307 | 0.000508698 |
| 3.72209 | 2.12298 | 0.000508719 |
| 3.72477 | 2.12289 | 0.000511096 |
| 3.72744 | 2.1228 | 0.000511119 |
| 3.73013 | 2.1227 | 0.000513496 |
| 3.73281 | 2.12261 | 0.000513518 |
| 3.7355 | 2.12252 | 0.000515896 |
| 3.73819 | 2.12243 | 0.000515919 |
| 3.74089 | 2.12234 | 0.000518297 |
| 3.74359 | 2.12224 | 0.000518319 |
| 3.7463 | 2.12215 | 0.000520698 |
| 3.74901 | 2.12206 | 0.000520721 |
| 3.75172 | 2.12196 | 0.0005231 |
| 3.75444 | 2.12187 | 0.000523123 |
| 3.75716 | 2.12178 | 0.000525503 |
| 3.75988 | 2.12168 | 0.000525526 |
| 3.76261 | 2.12159 | 0.000527906 |
| 3.76534 | 2.12149 | 0.00052793 |
| 3.76808 | 2.1214 | 0.00053031 |
| 3.77082 | 2.12131 | 0.000532691 |
| 3.77356 | 2.12121 | 0.000532715 |
| 3.77631 | 2.12112 | 0.000535096 |
| 3.77906 | 2.12102 | 0.00053512 |
| 3.78182 | 2.12092 | 0.000537501 |
| 3.78458 | 2.12083 | 0.000537526 |
| 3.78734 | 2.12073 | 0.000539908 |
| 3.79011 | 2.12063 | 0.000539933 |
| 3.79289 | 2.12054 | 0.000542315 |
| 3.79566 | 2.12044 | 0.00054234 |
| 3.79844 | 2.12034 | 0.000544723 |
| 3.80123 | 2.12025 | 0.000547106 |
| 3.80402 | 2.12015 | 0.000547131 |
| 3.80681 | 2.12005 | 0.000549515 |
| 3.80961 | 2.11995 | 0.000549541 |
| 3.81241 | 2.11985 | 0.000551925 |
| 3.81521 | 2.11975 | 0.000551951 |
| 3.81802 | 2.11966 | 0.000554335 |
| 3.82084 | 2.11956 | 0.000554361 |
| 3.82365 | 2.11946 | 0.000556746 |
| 3.82648 | 2.11936 | 0.000559131 |
| 3.8293 | 2.11926 | 0.000559158 |
| 3.83213 | 2.11916 | 0.000561544 |
| 3.83497 | 2.11906 | 0.00056157 |
| 3.83781 | 2.11896 | 0.000563957 |
| 3.84065 | 2.11886 | 0.000563984 |
| 3.8435 | 2.11876 | 0.00056637 |
| 3.84635 | 2.11866 | 0.000568757 |
| 3.8492 | 2.11855 | 0.000568784 |
| 3.85206 | 2.11845 | 0.000571172 |
| 3.85493 | 2.11835 | 0.0005712 |
| 3.85779 | 2.11825 | 0.000573588 |
| 3.86067 | 2.11814 | 0.000575976 |
| 3.86354 | 2.11804 | 0.000576004 |
| 3.86642 | 2.11794 | 0.000578393 |
| 3.86931 | 2.11783 | 0.000578421 |
| 3.8722 | 2.11773 | 0.000580811 |
| 3.87509 | 2.11763 | 0.0005832 |
| 3.87799 | 2.11752 | 0.000583229 |
| 3.88089 | 2.11742 | 0.000585619 |
| 3.8838 | 2.11731 | 0.000585648 |
| 3.88671 | 2.11721 | 0.000588039 |
| 3.88963 | 2.1171 | 0.000590429 |
| 3.89255 | 2.117 | 0.000590459 |
| 3.89547 | 2.11689 | 0.00059285 |
| 3.8984 | 2.11679 | 0.000592879 |
| 3.90134 | 2.11668 | 0.000595271 |
| 3.90427 | 2.11657 | 0.000597664 |
| 3.90722 | 2.11647 | 0.000597694 |
| 3.91016 | 2.11636 | 0.000600087 |
| 3.91311 | 2.11625 | 0.00060248 |
| 3.91607 | 2.11615 | 0.000602511 |
| 3.91903 | 2.11604 | 0.000604905 |
| 3.92199 | 2.11593 | 0.000607298 |
| 3.92496 | 2.11582 | 0.000607329 |
| 3.92794 | 2.11571 | 0.000609724 |
| 3.93091 | 2.1156 | 0.000609755 |
| 3.9339 | 2.11549 | 0.00061215 |
| 3.93688 | 2.11538 | 0.000614546 |
| 3.93987 | 2.11527 | 0.000614578 |
| 3.94287 | 2.11516 | 0.000616973 |
| 3.94587 | 2.11505 | 0.00061937 |
| 3.94888 | 2.11494 | 0.000619402 |
| 3.95189 | 2.11483 | 0.000621799 |
| 3.9549 | 2.11472 | 0.000624196 |
| 3.95792 | 2.11461 | 0.000624229 |
| 3.96094 | 2.1145 | 0.000626626 |
| 3.96397 | 2.11439 | 0.000629024 |
| 3.967 | 2.11427 | 0.000629058 |
| 3.97004 | 2.11416 | 0.000631457 |
| 3.97308 | 2.11405 | 0.000633855 |
| 3.97613 | 2.11393 | 0.000633889 |
| 3.97918 | 2.11382 | 0.000636288 |
| 3.98224 | 2.11371 | 0.000638688 |
| 3.9853 | 2.11359 | 0.000638723 |
| 3.98837 | 2.11348 | 0.000641123 |
| 3.99144 | 2.11336 | 0.000643524 |
| 3.99451 | 2.11325 | 0.000643559 |
| 3.99759 | 2.11313 | 0.00064596 |
| 4.00068 | 2.11302 | 0.000648362 |
| 4.00376 | 2.1129 | 0.000650764 |
| 4.00686 | 2.11278 | 0.0006508 |
| 4.00996 | 2.11267 | 0.000653202 |
| 4.01306 | 2.11255 | 0.000655605 |
| 4.01617 | 2.11243 | 0.000655642 |
| 4.01928 | 2.11232 | 0.000658045 |
| 4.0224 | 2.1122 | 0.000660449 |
| 4.02552 | 2.11208 | 0.000660486 |
| 4.02865 | 2.11196 | 0.00066289 |
| 4.03178 | 2.11185 | 0.000665295 |
| 4.03492 | 2.11173 | 0.0006677 |
| 4.03806 | 2.11161 | 0.000667738 |
| 4.04121 | 2.11149 | 0.000670144 |
| 4.04436 | 2.11137 | 0.00067255 |
| 4.04752 | 2.11125 | 0.000674957 |
| 4.05068 | 2.11113 | 0.000674995 |
| 4.05385 | 2.111 | 0.000677403 |
| 4.05702 | 2.11088 | 0.00067981 |
| 4.0602 | 2.11076 | 0.000682218 |
| 4.06338 | 2.11064 | 0.000682258 |
| 4.06657 | 2.11052 | 0.000684666 |
| 4.06976 | 2.1104 | 0.000687075 |
| 4.07296 | 2.11027 | 0.000689484 |
| 4.07616 | 2.11015 | 0.000689525 |
| 4.07937 | 2.11003 | 0.000691935 |
| 4.08258 | 2.1099 | 0.000694345 |
| 4.0858 | 2.10978 | 0.000696755 |
| 4.08902 | 2.10965 | 0.000696797 |
| 4.09225 | 2.10953 | 0.000699208 |
| 4.09548 | 2.10941 | 0.00070162 |
| 4.09872 | 2.10928 | 0.000704032 |
| 4.10196 | 2.10915 | 0.000704074 |
| 4.10521 | 2.10903 | 0.000706486 |
| 4.10846 | 2.1089 | 0.0007089 |
| 4.11172 | 2.10877 | 0.000711314 |
| 4.11498 | 2.10865 | 0.000713728 |
| 4.11825 | 2.10852 | 0.000713771 |
| 4.12152 | 2.10839 | 0.000716186 |
| 4.1248 | 2.10826 | 0.000718601 |
| 4.12809 | 2.10813 | 0.000721017 |
| 4.13137 | 2.10801 | 0.000723432 |
| 4.13467 | 2.10788 | 0.000723477 |
| 4.13797 | 2.10775 | 0.000725893 |
| 4.14127 | 2.10762 | 0.000728311 |
| 4.14458 | 2.10749 | 0.000730728 |
| 4.1479 | 2.10736 | 0.000733146 |
| 4.15122 | 2.10723 | 0.000733191 |
| 4.15455 | 2.10709 | 0.000735611 |
| 4.15788 | 2.10696 | 0.000738029 |
| 4.16122 | 2.10683 | 0.000740449 |
| 4.16456 | 2.1067 | 0.000742869 |
| 4.16791 | 2.10656 | 0.00074529 |
| 4.17126 | 2.10643 | 0.000745337 |
| 4.17462 | 2.1063 | 0.000747757 |
| 4.17798 | 2.10616 | 0.000750179 |
| 4.18135 | 2.10603 | 0.000752601 |
| 4.18473 | 2.10589 | 0.000755024 |
| 4.18811 | 2.10576 | 0.000757446 |
| 4.19149 | 2.10563 | 0.000759869 |
| 4.19488 | 2.10549 | 0.000759919 |
| 4.19828 | 2.10535 | 0.000762343 |
| 4.20168 | 2.10522 | 0.000764767 |
| 4.20509 | 2.10508 | 0.000767192 |
| 4.2085 | 2.10494 | 0.000769617 |
| 4.21192 | 2.1048 | 0.000772043 |
| 4.21535 | 2.10467 | 0.00077447 |
| 4.21878 | 2.10453 | 0.000776896 |
| 4.22221 | 2.10439 | 0.000776947 |
| 4.22565 | 2.10425 | 0.000779375 |
| 4.2291 | 2.10411 | 0.000781803 |
| 4.23255 | 2.10397 | 0.000784232 |
| 4.23601 | 2.10383 | 0.000786661 |
| 4.23947 | 2.10369 | 0.00078909 |
| 4.24294 | 2.10355 | 0.000791519 |
| 4.24642 | 2.10341 | 0.00079395 |
| 4.2499 | 2.10327 | 0.00079638 |
| 4.25338 | 2.10312 | 0.000798812 |
| 4.25688 | 2.10298 | 0.000798866 |
| 4.26037 | 2.10284 | 0.000801299 |
| 4.26388 | 2.10269 | 0.000803731 |
| 4.26739 | 2.10255 | 0.000806164 |
| 4.2709 | 2.10241 | 0.000808597 |
| 4.27442 | 2.10226 | 0.000811032 |
| 4.27795 | 2.10212 | 0.000813466 |
| 4.28148 | 2.10197 | 0.000815901 |
| 4.28502 | 2.10182 | 0.000818337 |
| 4.28856 | 2.10168 | 0.000820773 |
| 4.29212 | 2.10153 | 0.00082321 |
| 4.29567 | 2.10138 | 0.000825647 |
| 4.29923 | 2.10124 | 0.000828084 |
| 4.3028 | 2.10109 | 0.000830522 |
| 4.30637 | 2.10094 | 0.00083296 |
| 4.30995 | 2.10079 | 0.0008354 |
| 4.31354 | 2.10064 | 0.00083784 |
| 4.31713 | 2.10049 | 0.00084028 |
| 4.32073 | 2.10034 | 0.00084272 |
| 4.32433 | 2.10019 | 0.000845161 |
| 4.32794 | 2.10004 | 0.000847603 |
| 4.33156 | 2.09989 | 0.000850045 |
| 4.33518 | 2.09974 | 0.000852488 |
| 4.33881 | 2.09958 | 0.000854931 |
| 4.34244 | 2.09943 | 0.000857375 |
| 4.34608 | 2.09928 | 0.000859819 |
| 4.34973 | 2.09912 | 0.000862265 |
| 4.35338 | 2.09897 | 0.000864709 |
| 4.35704 | 2.09882 | 0.000867155 |
| 4.3607 | 2.09866 | 0.000869602 |
| 4.36437 | 2.0985 | 0.00087205 |
| 4.36805 | 2.09835 | 0.000874497 |
| 4.37173 | 2.09819 | 0.000876945 |
| 4.37542 | 2.09804 | 0.000879393 |
| 4.37912 | 2.09788 | 0.000881843 |
| 4.38282 | 2.09772 | 0.000884293 |
| 4.38653 | 2.09756 | 0.000886743 |
| 4.39024 | 2.0974 | 0.000889195 |
| 4.39396 | 2.09725 | 0.000891646 |
| 4.39769 | 2.09709 | 0.000894098 |
| 4.40142 | 2.09693 | 0.00089655 |
| 4.40516 | 2.09676 | 0.000899004 |
| 4.40891 | 2.0966 | 0.000901458 |
| 4.41266 | 2.09644 | 0.000906297 |
| 4.41642 | 2.09628 | 0.000908753 |
| 4.42018 | 2.09612 | 0.000911208 |
| 4.42395 | 2.09596 | 0.000913664 |
| 4.42773 | 2.09579 | 0.000916122 |
| 4.43152 | 2.09563 | 0.000918579 |
| 4.43531 | 2.09546 | 0.000921037 |
| 4.43911 | 2.0953 | 0.000923496 |
| 4.44291 | 2.09513 | 0.000925956 |
| 4.44672 | 2.09497 | 0.000930802 |
| 4.45054 | 2.0948 | 0.000933263 |
| 4.45436 | 2.09463 | 0.000935724 |
| 4.45819 | 2.09447 | 0.000938186 |
| 4.46203 | 2.0943 | 0.000940649 |
| 4.46587 | 2.09413 | 0.000943112 |
| 4.46972 | 2.09396 | 0.000945575 |
| 4.47358 | 2.09379 | 0.000950428 |
| 4.47744 | 2.09362 | 0.000952893 |
| 4.48131 | 2.09345 | 0.00095536 |
| 4.48519 | 2.09328 | 0.000957826 |
| 4.48907 | 2.09311 | 0.000960293 |
| 4.49296 | 2.09294 | 0.000962761 |
| 4.49686 | 2.09277 | 0.000967619 |
| 4.50076 | 2.09259 | 0.000970088 |
| 4.50467 | 2.09242 | 0.000972558 |
| 4.50859 | 2.09225 | 0.000975029 |
| 4.51251 | 2.09207 | 0.0009775 |
| 4.51644 | 2.0919 | 0.000982362 |
| 4.52038 | 2.09172 | 0.000984834 |
| 4.52432 | 2.09155 | 0.000987308 |
| 4.52828 | 2.09137 | 0.000989783 |
| 4.53223 | 2.09119 | 0.000992257 |
| 4.5362 | 2.09101 | 0.000997124 |
| 4.54017 | 2.09084 | 0.000999601 |
| 4.54415 | 2.09066 | 0.00100208 |
| 4.54814 | 2.09048 | 0.00100456 |
| 4.55213 | 2.0903 | 0.00100943 |
| 4.55613 | 2.09012 | 0.0010119 |
| 4.56014 | 2.08994 | 0.00101439 |
| 4.56415 | 2.08975 | 0.00101687 |
| 4.56817 | 2.08957 | 0.00102174 |
| 4.5722 | 2.08939 | 0.00102422 |
| 4.57624 | 2.08921 | 0.00102671 |
| 4.58028 | 2.08902 | 0.00103158 |
| 4.58433 | 2.08884 | 0.00103407 |
| 4.58838 | 2.08865 | 0.00103655 |
| 4.59245 | 2.08847 | 0.00103904 |
| 4.59652 | 2.08828 | 0.00104392 |
| 4.6006 | 2.0881 | 0.00104641 |
| 4.60468 | 2.08791 | 0.0010489 |
| 4.60878 | 2.08772 | 0.00105378 |
| 4.61288 | 2.08753 | 0.00105627 |
| 4.61699 | 2.08734 | 0.00105876 |
| 4.6211 | 2.08715 | 0.00106365 |
| 4.62522 | 2.08696 | 0.00106614 |
| 4.62935 | 2.08677 | 0.00106864 |
| 4.63349 | 2.08658 | 0.00107353 |
| 4.63763 | 2.08639 | 0.00107602 |
| 4.64179 | 2.0862 | 0.00108092 |
| 4.64595 | 2.086 | 0.00108341 |
| 4.65011 | 2.08581 | 0.00108591 |
| 4.65429 | 2.08562 | 0.00109081 |
| 4.65847 | 2.08542 | 0.00109331 |
| 4.66266 | 2.08522 | 0.00109581 |
| 4.66685 | 2.08503 | 0.0011007 |
| 4.67106 | 2.08483 | 0.00110321 |
| 4.67527 | 2.08463 | 0.00110811 |
| 4.67949 | 2.08444 | 0.00111061 |
| 4.68372 | 2.08424 | 0.00111552 |
| 4.68795 | 2.08404 | 0.00111802 |
| 4.69219 | 2.08384 | 0.00112053 |
| 4.69644 | 2.08364 | 0.00112544 |
| 4.7007 | 2.08343 | 0.00112794 |
| 4.70497 | 2.08323 | 0.00113285 |
| 4.70924 | 2.08303 | 0.00113537 |
| 4.71352 | 2.08283 | 0.00114028 |
| 4.71781 | 2.08262 | 0.00114279 |
| 4.72211 | 2.08242 | 0.0011477 |
| 4.72641 | 2.08221 | 0.00115022 |
| 4.73073 | 2.08201 | 0.00115514 |
| 4.73505 | 2.0818 | 0.00115765 |
| 4.73937 | 2.08159 | 0.00116257 |
| 4.74371 | 2.08138 | 0.00116509 |
| 4.74805 | 2.08118 | 0.00117001 |
| 4.75241 | 2.08097 | 0.00117253 |
| 4.75677 | 2.08076 | 0.00117746 |
| 4.76113 | 2.08055 | 0.00117998 |
| 4.76551 | 2.08033 | 0.00118491 |
| 4.76989 | 2.08012 | 0.00118983 |
| 4.77429 | 2.07991 | 0.00119236 |
| 4.77869 | 2.0797 | 0.00119729 |
| 4.78309 | 2.07948 | 0.00119982 |
| 4.78751 | 2.07927 | 0.00120475 |
| 4.79194 | 2.07905 | 0.00120728 |
| 4.79637 | 2.07884 | 0.00121222 |
| 4.80081 | 2.07862 | 0.00121715 |
| 4.80526 | 2.0784 | 0.00121969 |
| 4.80972 | 2.07818 | 0.00122463 |
| 4.81418 | 2.07797 | 0.00122957 |
| 4.81866 | 2.07774 | 0.00123211 |
| 4.82314 | 2.07753 | 0.00123705 |
| 4.82763 | 2.0773 | 0.00123959 |
| 4.83213 | 2.07708 | 0.00124454 |
| 4.83664 | 2.07686 | 0.00124948 |
| 4.84115 | 2.07663 | 0.00125203 |
| 4.84568 | 2.07641 | 0.00125698 |
| 4.85021 | 2.07619 | 0.00126193 |
| 4.85475 | 2.07596 | 0.00126447 |
| 4.8593 | 2.07573 | 0.00126943 |
| 4.86386 | 2.07551 | 0.00127439 |
| 4.86843 | 2.07528 | 0.00127935 |
| 4.873 | 2.07505 | 0.0012819 |
| 4.87759 | 2.07482 | 0.00128686 |
| 4.88218 | 2.07459 | 0.00129182 |
| 4.88678 | 2.07436 | 0.00129679 |
| 4.89139 | 2.07413 | 0.00129934 |
| 4.89601 | 2.0739 | 0.00130431 |
| 4.90064 | 2.07366 | 0.00130928 |
| 4.90527 | 2.07343 | 0.00131425 |
| 4.90992 | 2.07319 | 0.00131681 |
| 4.91457 | 2.07295 | 0.00132178 |
| 4.91924 | 2.07272 | 0.00132676 |
| 4.92391 | 2.07248 | 0.00133174 |
| 4.92859 | 2.07224 | 0.00133672 |
| 4.93328 | 2.072 | 0.0013417 |
| 4.93798 | 2.07177 | 0.00134426 |
| 4.94268 | 2.07152 | 0.00134925 |
| 4.9474 | 2.07128 | 0.00135423 |
| 4.95213 | 2.07104 | 0.00135922 |
| 4.95686 | 2.0708 | 0.00136421 |
| 4.9616 | 2.07055 | 0.0013692 |
| 4.96636 | 2.07031 | 0.00137419 |
| 4.97112 | 2.07006 | 0.00137677 |
| 4.97589 | 2.06981 | 0.00138177 |
| 4.98067 | 2.06957 | 0.00138676 |
| 4.98546 | 2.06932 | 0.00139176 |
| 4.99026 | 2.06907 | 0.00139676 |
| 4.99506 | 2.06882 | 0.00140176 |
| 4.99988 | 2.06857 | 0.00140677 |
| 5.00471 | 2.06832 | 0.00141177 |
| 5.00954 | 2.06806 | 0.00141678 |
| 5.01439 | 2.06781 | 0.00142179 |
| 5.01924 | 2.06756 | 0.0014268 |
| 5.0241 | 2.0673 | 0.00143182 |
| 5.02898 | 2.06705 | 0.00143683 |
| 5.03386 | 2.06679 | 0.00144185 |
| 5.03875 | 2.06653 | 0.00144687 |
| 5.04365 | 2.06627 | 0.00145189 |
| 5.04856 | 2.06601 | 0.00145691 |
| 5.05348 | 2.06575 | 0.00146194 |
| 5.05841 | 2.06549 | 0.00146696 |
| 5.06335 | 2.06523 | 0.00147199 |
| 5.0683 | 2.06496 | 0.00147702 |
| 5.07326 | 2.0647 | 0.00148206 |
| 5.07823 | 2.06444 | 0.00148709 |
| 5.08321 | 2.06417 | 0.00149455 |
| 5.0882 | 2.0639 | 0.00149959 |
| 5.0932 | 2.06363 | 0.00150463 |
| 5.09821 | 2.06336 | 0.00150967 |
| 5.10322 | 2.06309 | 0.00151472 |
| 5.10825 | 2.06282 | 0.00151976 |
| 5.11329 | 2.06255 | 0.00152481 |
| 5.11834 | 2.06228 | 0.00153229 |
| 5.12339 | 2.062 | 0.00153734 |
| 5.12846 | 2.06173 | 0.0015424 |
| 5.13354 | 2.06145 | 0.00154745 |
| 5.13863 | 2.06118 | 0.00155251 |
| 5.14373 | 2.0609 | 0.00156 |
| 5.14883 | 2.06062 | 0.00156507 |
| 5.15395 | 2.06034 | 0.00157013 |
| 5.15908 | 2.06006 | 0.00157763 |
| 5.16422 | 2.05977 | 0.0015827 |
| 5.16937 | 2.05949 | 0.00158777 |
| 5.17453 | 2.05921 | 0.00159285 |
| 5.1797 | 2.05892 | 0.00160035 |
| 5.18487 | 2.05864 | 0.00160543 |
| 5.19007 | 2.05835 | 0.00161052 |
| 5.19527 | 2.05806 | 0.00161803 |
| 5.20048 | 2.05777 | 0.00162312 |
| 5.2057 | 2.05748 | 0.00162821 |
| 5.21093 | 2.05719 | 0.00163573 |
| 5.21617 | 2.0569 | 0.00164082 |
| 5.22142 | 2.0566 | 0.00164835 |
| 5.22669 | 2.05631 | 0.00165345 |
| 5.23196 | 2.05601 | 0.00165855 |
| 5.23725 | 2.05571 | 0.00166609 |
| 5.24254 | 2.05542 | 0.00167119 |
| 5.24785 | 2.05512 | 0.00167874 |
| 5.25317 | 2.05482 | 0.00168385 |
| 5.25849 | 2.05452 | 0.0016914 |
| 5.26383 | 2.05421 | 0.00169651 |
| 5.26918 | 2.05391 | 0.00170407 |
| 5.27454 | 2.0536 | 0.00170919 |
| 5.27991 | 2.0533 | 0.00171675 |
| 5.2853 | 2.05299 | 0.00172188 |
| 5.29069 | 2.05268 | 0.00172944 |
| 5.29609 | 2.05237 | 0.00173701 |
| 5.30151 | 2.05206 | 0.00174215 |
| 5.30693 | 2.05175 | 0.00174972 |
| 5.31237 | 2.05144 | 0.00175487 |
| 5.31782 | 2.05112 | 0.00176245 |
| 5.32328 | 2.05081 | 0.00177003 |
| 5.32875 | 2.05049 | 0.00177518 |
| 5.33423 | 2.05017 | 0.00178278 |
| 5.33973 | 2.04985 | 0.00179037 |
| 5.34523 | 2.04953 | 0.00179553 |
| 5.35075 | 2.04921 | 0.00180313 |
| 5.35628 | 2.04889 | 0.00181074 |
| 5.36181 | 2.04857 | 0.00181834 |
| 5.36737 | 2.04824 | 0.00182352 |
| 5.37293 | 2.04791 | 0.00183113 |
| 5.3785 | 2.04759 | 0.00183875 |
| 5.38409 | 2.04726 | 0.00184637 |
| 5.38968 | 2.04693 | 0.00185156 |
| 5.39529 | 2.0466 | 0.00185919 |
| 5.40091 | 2.04626 | 0.00186682 |
| 5.40654 | 2.04593 | 0.00187445 |
| 5.41219 | 2.04559 | 0.00188209 |
| 5.41784 | 2.04526 | 0.00188974 |
| 5.42351 | 2.04492 | 0.00189739 |
| 5.42919 | 2.04458 | 0.00190259 |
| 5.43488 | 2.04424 | 0.00191025 |
| 5.44058 | 2.0439 | 0.00191791 |
| 5.4463 | 2.04355 | 0.00192557 |
| 5.45202 | 2.04321 | 0.00193324 |
| 5.45776 | 2.04286 | 0.0019409 |
| 5.46351 | 2.04251 | 0.00194858 |
| 5.46928 | 2.04217 | 0.00195626 |
| 5.47505 | 2.04181 | 0.00196394 |
| 5.48084 | 2.04146 | 0.00197162 |
| 5.48664 | 2.04111 | 0.00197931 |
| 5.49245 | 2.04076 | 0.00198946 |
| 5.49828 | 2.0404 | 0.00199716 |
| 5.50411 | 2.04004 | 0.00200486 |
| 5.50996 | 2.03968 | 0.00201257 |
| 5.51582 | 2.03932 | 0.00202028 |
| 5.5217 | 2.03896 | 0.00202799 |
| 5.52759 | 2.0386 | 0.00203571 |
| 5.53348 | 2.03824 | 0.00204589 |
| 5.5394 | 2.03787 | 0.00205362 |
| 5.54532 | 2.0375 | 0.00206135 |
| 5.55126 | 2.03713 | 0.00206909 |
| 5.55721 | 2.03676 | 0.00207928 |
| 5.56317 | 2.03639 | 0.00208703 |
| 5.56915 | 2.03602 | 0.00209478 |
| 5.57513 | 2.03564 | 0.00210499 |
| 5.58114 | 2.03527 | 0.00211275 |
| 5.58715 | 2.03489 | 0.00212051 |
| 5.59318 | 2.03451 | 0.00213074 |
| 5.59922 | 2.03413 | 0.00213851 |
| 5.60527 | 2.03374 | 0.00214629 |
| 5.61134 | 2.03336 | 0.00215653 |
| 5.61742 | 2.03297 | 0.00216432 |
| 5.62351 | 2.03259 | 0.00217457 |
| 5.62961 | 2.0322 | 0.00218237 |
| 5.63573 | 2.03181 | 0.00219263 |
| 5.64187 | 2.03141 | 0.00220044 |
| 5.64801 | 2.03102 | 0.00221071 |
| 5.65417 | 2.03062 | 0.00221853 |
| 5.66034 | 2.03023 | 0.00222882 |
| 5.66653 | 2.02983 | 0.00223911 |
| 5.67273 | 2.02943 | 0.00224694 |
| 5.67894 | 2.02902 | 0.00225724 |
| 5.68517 | 2.02862 | 0.00226755 |
| 5.69141 | 2.02821 | 0.0022754 |
| 5.69766 | 2.02781 | 0.00228572 |
| 5.70393 | 2.0274 | 0.00229605 |
| 5.71021 | 2.02699 | 0.00230391 |
| 5.71651 | 2.02657 | 0.00231425 |
| 5.72282 | 2.02616 | 0.00232459 |
| 5.72914 | 2.02574 | 0.00233495 |
| 5.73548 | 2.02533 | 0.0023453 |
| 5.74183 | 2.02491 | 0.0023532 |
| 5.7482 | 2.02449 | 0.00236356 |
| 5.75458 | 2.02406 | 0.00237394 |
| 5.76097 | 2.02364 | 0.00238432 |
| 5.76738 | 2.02321 | 0.00239471 |
| 5.7738 | 2.02278 | 0.0024051 |
| 5.78024 | 2.02235 | 0.0024155 |
| 5.78669 | 2.02192 | 0.00242591 |
| 5.79316 | 2.02148 | 0.00243633 |
| 5.79964 | 2.02105 | 0.00244675 |
| 5.80613 | 2.02061 | 0.00245718 |
| 5.81264 | 2.02017 | 0.00246761 |
| 5.81916 | 2.01973 | 0.00247805 |
| 5.8257 | 2.01928 | 0.00249098 |
| 5.83226 | 2.01884 | 0.00250144 |
| 5.83882 | 2.01839 | 0.0025119 |
| 5.84541 | 2.01794 | 0.00252237 |
| 5.852 | 2.01749 | 0.00253285 |
| 5.85862 | 2.01704 | 0.00254581 |
| 5.86524 | 2.01658 | 0.00255631 |
| 5.87189 | 2.01612 | 0.00256681 |
| 5.87854 | 2.01566 | 0.0025798 |
| 5.88522 | 2.0152 | 0.00259031 |
| 5.8919 | 2.01474 | 0.00260332 |
| 5.89861 | 2.01427 | 0.00261385 |
| 5.90532 | 2.0138 | 0.00262439 |
| 5.91206 | 2.01333 | 0.00263742 |
| 5.91881 | 2.01286 | 0.00264797 |
| 5.92557 | 2.01239 | 0.00266102 |
| 5.93235 | 2.01191 | 0.00267159 |
| 5.93915 | 2.01143 | 0.00268465 |
| 5.94596 | 2.01095 | 0.00269773 |
| 5.95278 | 2.01047 | 0.00270832 |
| 5.95963 | 2.00998 | 0.00272141 |
| 5.96648 | 2.0095 | 0.00273452 |
| 5.97336 | 2.00901 | 0.00274513 |
| 5.98025 | 2.00852 | 0.00275825 |
| 5.98715 | 2.00802 | 0.00277138 |
| 5.99408 | 2.00753 | 0.00278452 |
| 6.00101 | 2.00703 | 0.00279767 |
| 6.00797 | 2.00653 | 0.00280833 |
| 6.01494 | 2.00603 | 0.0028215 |
| 6.02192 | 2.00552 | 0.00283468 |
| 6.02892 | 2.00501 | 0.00284787 |
| 6.03594 | 2.0045 | 0.00286106 |
| 6.04298 | 2.00399 | 0.00287427 |
| 6.05003 | 2.00347 | 0.00288748 |
| 6.0571 | 2.00296 | 0.00290071 |
| 6.06418 | 2.00244 | 0.00291395 |
| 6.07128 | 2.00192 | 0.00292969 |
| 6.0784 | 2.00139 | 0.00294295 |
| 6.08553 | 2.00086 | 0.00295622 |
| 6.09269 | 2.00034 | 0.0029695 |
| 6.09985 | 1.9998 | 0.00298279 |
| 6.10704 | 1.99927 | 0.0029986 |
| 6.11424 | 1.99873 | 0.00301191 |
| 6.12146 | 1.99819 | 0.00302523 |
| 6.12869 | 1.99765 | 0.00304107 |
| 6.13595 | 1.99711 | 0.00305442 |
| 6.14322 | 1.99656 | 0.00307028 |
| 6.1505 | 1.99601 | 0.00308365 |
| 6.15781 | 1.99546 | 0.00309954 |
| 6.16513 | 1.9949 | 0.00311293 |
| 6.17247 | 1.99435 | 0.00312884 |
| 6.17983 | 1.99379 | 0.00314477 |
| 6.1872 | 1.99322 | 0.0031582 |
| 6.19459 | 1.99266 | 0.00317415 |
| 6.202 | 1.99209 | 0.00319012 |
| 6.20943 | 1.99152 | 0.00320609 |
| 6.21688 | 1.99094 | 0.00321958 |
| 6.22434 | 1.99037 | 0.00323558 |
| 6.23182 | 1.98979 | 0.0032516 |
| 6.23932 | 1.98921 | 0.00326764 |
| 6.24684 | 1.98862 | 0.00328368 |
| 6.25437 | 1.98803 | 0.00329974 |
| 6.26193 | 1.98744 | 0.00331582 |
| 6.2695 | 1.98685 | 0.00333191 |
| 6.27709 | 1.98625 | 0.00334801 |
| 6.2847 | 1.98565 | 0.00336665 |
| 6.29232 | 1.98505 | 0.00338279 |
| 6.29997 | 1.98444 | 0.00339894 |
| 6.30763 | 1.98384 | 0.0034151 |
| 6.31532 | 1.98323 | 0.0034338 |
| 6.32302 | 1.98261 | 0.00345 |
| 6.33074 | 1.98199 | 0.00346621 |
| 6.33848 | 1.98137 | 0.00348496 |
| 6.34624 | 1.98075 | 0.0035012 |
| 6.35401 | 1.98012 | 0.00351999 |
| 6.36181 | 1.97949 | 0.00353626 |
| 6.36963 | 1.97886 | 0.00355508 |
| 6.37746 | 1.97822 | 0.00357392 |
| 6.38531 | 1.97758 | 0.00359277 |
| 6.39319 | 1.97694 | 0.00360912 |
| 6.40108 | 1.97629 | 0.00362801 |
| 6.40899 | 1.97564 | 0.00364691 |
| 6.41692 | 1.97499 | 0.00366584 |
| 6.42488 | 1.97433 | 0.00368479 |
| 6.43285 | 1.97367 | 0.00370376 |
| 6.44084 | 1.97301 | 0.00372274 |
| 6.44885 | 1.97234 | 0.00374174 |
| 6.45688 | 1.97167 | 0.00376077 |
| 6.46493 | 1.971 | 0.00377981 |
| 6.473 | 1.97032 | 0.00379887 |
| 6.48109 | 1.96964 | 0.00382049 |
| 6.48921 | 1.96896 | 0.00383959 |
| 6.49734 | 1.96827 | 0.00385871 |
| 6.50549 | 1.96758 | 0.0038804 |
| 6.51366 | 1.96688 | 0.00389957 |
| 6.52186 | 1.96619 | 0.00392129 |
| 6.53007 | 1.96548 | 0.00394051 |
| 6.5383 | 1.96478 | 0.00396228 |
| 6.54656 | 1.96407 | 0.00398408 |
| 6.55484 | 1.96336 | 0.0040059 |
| 6.56313 | 1.96264 | 0.00402519 |
| 6.57145 | 1.96192 | 0.00404706 |
| 6.57979 | 1.96119 | 0.00406895 |
| 6.58815 | 1.96046 | 0.00409087 |
| 6.59653 | 1.95973 | 0.00411281 |
| 6.60494 | 1.959 | 0.00413477 |
| 6.61336 | 1.95826 | 0.00415676 |
| 6.62181 | 1.95751 | 0.00417878 |
| 6.63027 | 1.95676 | 0.00420337 |
| 6.63876 | 1.95601 | 0.00422544 |
| 6.64728 | 1.95525 | 0.00424754 |
| 6.65581 | 1.95449 | 0.00427221 |
| 6.66436 | 1.95373 | 0.00429436 |
| 6.67294 | 1.95296 | 0.00431909 |
| 6.68154 | 1.95218 | 0.00434129 |
| 6.69016 | 1.95141 | 0.00436608 |
| 6.6988 | 1.95063 | 0.0043909 |
| 6.70747 | 1.94984 | 0.00441575 |
| 6.71616 | 1.94905 | 0.00444063 |
| 6.72487 | 1.94825 | 0.00446297 |
| 6.7336 | 1.94745 | 0.00448791 |
| 6.74236 | 1.94665 | 0.00451288 |
| 6.75114 | 1.94584 | 0.00454045 |
| 6.75994 | 1.94503 | 0.00456549 |
| 6.76877 | 1.94421 | 0.00459055 |
| 6.77761 | 1.94339 | 0.00461565 |
| 6.78649 | 1.94256 | 0.00464335 |
| 6.79538 | 1.94173 | 0.00466851 |
| 6.8043 | 1.94089 | 0.00469629 |
| 6.81324 | 1.94005 | 0.00472152 |
| 6.8222 | 1.93921 | 0.00474936 |
| 6.83119 | 1.93836 | 0.00477724 |
| 6.8402 | 1.9375 | 0.00480516 |
| 6.84924 | 1.93664 | 0.00483053 |
| 6.8583 | 1.93578 | 0.00485851 |
| 6.86738 | 1.93491 | 0.00488654 |
| 6.87649 | 1.93403 | 0.00491719 |
| 6.88562 | 1.93315 | 0.0049453 |
| 6.89478 | 1.93226 | 0.00497344 |
| 6.90396 | 1.93137 | 0.00500162 |
| 6.91317 | 1.93048 | 0.00503243 |
| 6.9224 | 1.92958 | 0.0050607 |
| 6.93165 | 1.92867 | 0.00509159 |
| 6.94093 | 1.92776 | 0.00511993 |
| 6.95023 | 1.92684 | 0.00515092 |
| 6.95956 | 1.92592 | 0.00518194 |
| 6.96892 | 1.92499 | 0.00521301 |
| 6.9783 | 1.92406 | 0.00524413 |
| 6.9877 | 1.92312 | 0.00527529 |
| 6.99713 | 1.92217 | 0.00530649 |
| 7.00659 | 1.92122 | 0.00533775 |
| 7.01607 | 1.92027 | 0.00537165 |
| 7.02558 | 1.9193 | 0.005403 |
| 7.03511 | 1.91834 | 0.005437 |
| 7.04467 | 1.91736 | 0.00546845 |
| 7.05425 | 1.91638 | 0.00550256 |
| 7.06386 | 1.9154 | 0.00553671 |
| 7.0735 | 1.91441 | 0.00557092 |
| 7.08316 | 1.91341 | 0.00560518 |
| 7.09285 | 1.9124 | 0.0056395 |
| 7.10257 | 1.9114 | 0.00567387 |
| 7.11231 | 1.91038 | 0.0057083 |
| 7.12208 | 1.90936 | 0.00574277 |
| 7.13188 | 1.90833 | 0.00577993 |
| 7.1417 | 1.90729 | 0.00581715 |
| 7.15155 | 1.90625 | 0.0058518 |
| 7.16143 | 1.9052 | 0.00588914 |
| 7.17133 | 1.90415 | 0.00592654 |
| 7.18127 | 1.90309 | 0.005964 |
| 7.19123 | 1.90202 | 0.00600153 |
| 7.20122 | 1.90094 | 0.00603911 |
| 7.21123 | 1.89986 | 0.00607676 |
| 7.22127 | 1.89877 | 0.00611711 |
| 7.23135 | 1.89768 | 0.00615489 |
| 7.24145 | 1.89657 | 0.00619539 |
| 7.25157 | 1.89546 | 0.00623594 |
| 7.26173 | 1.89435 | 0.00627393 |
| 7.27191 | 1.89322 | 0.00631463 |
| 7.28213 | 1.89209 | 0.00635804 |
| 7.29237 | 1.89095 | 0.00639889 |
| 7.30264 | 1.88981 | 0.00643981 |
| 7.31294 | 1.88865 | 0.00648081 |
| 7.32327 | 1.88749 | 0.00652453 |
| 7.33363 | 1.88632 | 0.00656834 |
| 7.34402 | 1.88515 | 0.00661221 |
| 7.35443 | 1.88396 | 0.00665353 |
| 7.36488 | 1.88277 | 0.00669758 |
| 7.37536 | 1.88157 | 0.00674437 |
| 7.38586 | 1.88036 | 0.00678858 |
| 7.3964 | 1.87915 | 0.00683289 |
| 7.40696 | 1.87792 | 0.00687995 |
| 7.41756 | 1.87669 | 0.00692709 |
| 7.42819 | 1.87545 | 0.00697433 |
| 7.43885 | 1.8742 | 0.00702167 |
| 7.44953 | 1.87294 | 0.00706909 |
| 7.46025 | 1.87168 | 0.00711662 |
| 7.471 | 1.8704 | 0.00716424 |
| 7.48178 | 1.86912 | 0.00721463 |
| 7.49259 | 1.86783 | 0.00726513 |
| 7.50344 | 1.86652 | 0.00731307 |
| 7.51431 | 1.86521 | 0.00736378 |
| 7.52522 | 1.86389 | 0.00741727 |
| 7.53616 | 1.86256 | 0.0074682 |
| 7.54713 | 1.86123 | 0.00751923 |
| 7.55813 | 1.85988 | 0.00757308 |
| 7.56916 | 1.85852 | 0.00762702 |
| 7.58023 | 1.85716 | 0.0076811 |
| 7.59133 | 1.85578 | 0.00773529 |
| 7.60246 | 1.85439 | 0.0077896 |
| 7.61362 | 1.853 | 0.00784405 |
| 7.62482 | 1.85159 | 0.0079013 |
| 7.63605 | 1.85018 | 0.0079587 |
| 7.64731 | 1.84875 | 0.00801622 |
| 7.6586 | 1.84732 | 0.00807388 |
| 7.66993 | 1.84587 | 0.00813167 |
| 7.6813 | 1.84441 | 0.0081896 |
| 7.69269 | 1.84295 | 0.00825038 |
| 7.70412 | 1.84147 | 0.00831131 |
| 7.71559 | 1.83998 | 0.00837238 |
| 7.72709 | 1.83848 | 0.00843361 |
| 7.73862 | 1.83697 | 0.00849499 |
| 7.75019 | 1.83544 | 0.00855924 |
| 7.76179 | 1.83391 | 0.00862365 |
| 7.77343 | 1.83237 | 0.00868822 |
| 7.7851 | 1.83081 | 0.00875297 |
| 7.7968 | 1.82924 | 0.00881787 |
| 7.80855 | 1.82766 | 0.00888568 |
| 7.82032 | 1.82607 | 0.00895092 |
| 7.83214 | 1.82446 | 0.00901908 |
| 7.84399 | 1.82285 | 0.00909017 |
| 7.85587 | 1.82122 | 0.00915869 |
| 7.86779 | 1.81958 | 0.00923016 |
| 7.87975 | 1.81792 | 0.00929907 |
| 7.89174 | 1.81626 | 0.00937091 |
| 7.90377 | 1.81458 | 0.00944571 |
| 7.91584 | 1.81289 | 0.00951797 |
| 7.92794 | 1.81118 | 0.00959319 |
| 7.94008 | 1.80946 | 0.00966862 |
| 7.95226 | 1.80773 | 0.00974427 |
| 7.96448 | 1.80598 | 0.00982013 |
| 7.97673 | 1.80422 | 0.009899 |
| 7.98902 | 1.80245 | 0.0099781 |
| 8.00135 | 1.80066 | 0.0100574 |
| 8.01372 | 1.79886 | 0.0101398 |
| 8.02612 | 1.79704 | 0.0102196 |
| 8.03857 | 1.79521 | 0.0103024 |
| 8.05105 | 1.79336 | 0.0103855 |
| 8.06357 | 1.7915 | 0.0104717 |
| 8.07613 | 1.78963 | 0.0105581 |
| 8.08873 | 1.78773 | 0.0106448 |
| 8.10137 | 1.78583 | 0.0107317 |
| 8.11405 | 1.7839 | 0.010819 |
| 8.12676 | 1.78196 | 0.0109093 |
| 8.13952 | 1.78001 | 0.0109999 |
| 8.15232 | 1.77804 | 0.0110937 |
| 8.16516 | 1.77605 | 0.0111849 |
| 8.17804 | 1.77405 | 0.0112793 |
| 8.19096 | 1.77202 | 0.0113768 |
| 8.20392 | 1.76998 | 0.0114719 |
| 8.21692 | 1.76793 | 0.0115701 |
| 8.22996 | 1.76585 | 0.0116714 |
| 8.24304 | 1.76376 | 0.0117703 |
| 8.25617 | 1.76165 | 0.0118724 |
| 8.26934 | 1.75952 | 0.0119748 |
| 8.28255 | 1.75738 | 0.0120805 |
| 8.2958 | 1.75521 | 0.0121866 |
| 8.30909 | 1.75303 | 0.012293 |
| 8.32243 | 1.75083 | 0.0124027 |
| 8.33581 | 1.7486 | 0.0125129 |
| 8.34924 | 1.74636 | 0.0126234 |
| 8.3627 | 1.7441 | 0.0127373 |
| 8.37621 | 1.74181 | 0.0128515 |
| 8.38977 | 1.73951 | 0.0129663 |
| 8.40336 | 1.73719 | 0.0130844 |
| 8.417 | 1.73484 | 0.0132029 |
| 8.43069 | 1.73247 | 0.0133249 |
| 8.44442 | 1.73009 | 0.0134473 |
| 8.4582 | 1.72768 | 0.0135703 |
| 8.47202 | 1.72524 | 0.0136966 |
| 8.48588 | 1.72279 | 0.0138235 |
| 8.4998 | 1.72031 | 0.0139539 |
| 8.51375 | 1.71781 | 0.0140848 |
| 8.52775 | 1.71528 | 0.0142163 |
| 8.5418 | 1.71274 | 0.0143513 |
| 8.5559 | 1.71016 | 0.0144869 |
| 8.57004 | 1.70757 | 0.0146261 |
| 8.58423 | 1.70495 | 0.0147688 |
| 8.59847 | 1.7023 | 0.0149093 |
| 8.61275 | 1.69963 | 0.0150563 |
| 8.62708 | 1.69693 | 0.015201 |
| 8.64146 | 1.6942 | 0.0153494 |
| 8.65588 | 1.69145 | 0.0155015 |
| 8.67036 | 1.68867 | 0.0156543 |
| 8.68488 | 1.68586 | 0.0158109 |
| 8.69945 | 1.68303 | 0.0159682 |
| 8.71408 | 1.68016 | 0.0161294 |
| 8.72875 | 1.67727 | 0.0162943 |
| 8.74347 | 1.67435 | 0.0164571 |
| 8.75823 | 1.6714 | 0.0166268 |
Showing 2,000 of 2333 rows. Download the CSV for all of them.
Optical transmission calculator
Free-standing sample in vacuum, normal incidence- Transmittance T
- —
- Reflectance R
- —
Fresnel reflection calculator
- Rp
- —
- Rs
- —
- R = (Rp+Rs)/2
- —
- Phase φp
- —
- Phase φs
- —
- Brewster angle θB
- —
- Critical angle θC
- —
303 nm thick aluminum nitride (AlN) film deposited by reactive sputtering.